Patents by Inventor Arvid Maczeyzik

Arvid Maczeyzik has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND DEVICE FOR DRYING A COMPONENT INTERIOR
    Publication number: 20230026447
    Abstract: A method for drying a component interior of a component can be used in a lithographic process chain. The method includes a first drying step, in which simultaneously heated air is admitted into a component interior through an inlet, and the heated air is sucked out of the component interior through an outlet. The method also includes a succeeding second drying step, in which the inlet for the heated air is closed and the air is sucked out of the component interior, resulting in a reduced pressure is generated in the component interior.
    Type: Application
    Filed: October 3, 2022
    Publication date: January 26, 2023
    Inventors: Arvid Maczeyzik, Patrick Paul