Patents by Inventor Arvind Sundarajjan

Arvind Sundarajjan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • IN-SITU CLEAN PROCESS FOR METAL DEPOSITION CHAMBERS
    Publication number: 20120237693
    Abstract: Embodiments of the invention include methods for in-situ chamber dry clean for metal deposition chambers.
    Type: Application
    Filed: March 16, 2012
    Publication date: September 20, 2012
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Michael Jackson, Song-Moon Suh, Arvind Sundarajjan, Murali K. Narasimhan, Sriskantharajah Thirunavukarasu