Patents by Inventor Arvind THIYAGARAJAN

Arvind THIYAGARAJAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for cleaning a substrate after processing
    Patent number: 11551942
    Abstract: Methods and apparatus for removing substrate contamination are provided herein. In some embodiments, a multi-chamber processing apparatus includes: a processing chamber for processing a substrate; a factory interface (FI) coupled to the processing chamber via a load lock chamber disposed therebetween; and a cleaning chamber coupled to the FI and configured to rinse and to dry the substrate, wherein the cleaning chamber includes a chamber body defining an interior volume and having a first opening at an interface with the FI for transferring the substrate into and out of the interior volume.
    Type: Grant
    Filed: September 15, 2020
    Date of Patent: January 10, 2023
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Manoj A. Gajendra, Kyle Moran Hanson, Mahadev Joshi, Arvind Thiyagarajan, Jon Christian Farr
  • METHODS AND APPARATUS FOR CLEANING A SUBSTRATE AFTER PROCESSING
    Publication number: 20220084843
    Abstract: Methods and apparatus for removing substrate contamination are provided herein. In some embodiments, a multi-chamber processing apparatus includes: a processing chamber for processing a substrate; a factory interface (FI) coupled to the processing chamber via a load lock chamber disposed therebetween; and a cleaning chamber coupled to the FI and configured to rinse and to dry the substrate, wherein the cleaning chamber includes a chamber body defining an interior volume and having a first opening at an interface with the FI for transferring the substrate into and out of the interior volume.
    Type: Application
    Filed: September 15, 2020
    Publication date: March 17, 2022
    Inventors: Manoj A. GAJENDRA, Kyle Moran HANSON, Mahadev JOSHI, Arvind THIYAGARAJAN, Jon Christian FARR