Patents by Inventor Aryan Afzalian
Aryan Afzalian has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11894451Abstract: A semiconductor device includes first and second source/drain regions, a core channel region, a barrier layer, a shell, and a gate stack. The core channel region is between the first and second source/drain regions and is doped with first dopants. The barrier layer is between the core channel region and the second source/drain region and is doped with second dopants. The shell is over the core channel region and the barrier layer. The gate stack is over the shell.Type: GrantFiled: May 28, 2021Date of Patent: February 6, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Aryan Afzalian
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Patent number: 11688771Abstract: A method for manufacturing a semiconductor device includes forming a source and region in a substrate. A core channel region is formed adjacent the source region. A barrier layer is formed adjacent the core channel region. A drain region is formed in the substrate such that the barrier layer is between the core channel region and the drain region. A first portion of a shell is formed along the core channel region. A second portion of the shell is formed along the barrier layer. The second portion of the shell includes a different material than the first portion of the shell.Type: GrantFiled: May 21, 2021Date of Patent: June 27, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Aryan Afzalian
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Publication number: 20230178635Abstract: A method for forming a FET device is provided, the method including: forming a fin structure; while masking the fin structure from a second side of the fin structure opposite a first side of the fin structure: etching each of first and second fin parts laterally from the first side such that a set of source cavities and a set of drain cavities is formed in first non-channel layers in the first fin part and the second fin part, and subsequently, forming a source body and a drain body, each comprising a respective common body portion along the first side and a set of prongs protruding from the respective common body portion into the source and drain cavities, respectively, and abutting the channel layers; and while masking the fin structure from the first side: etching the third fin part laterally from the second side such that a set of gate cavities extending through the third fin part is formed in second non-channel layers, and subsequently, forming a gate body comprising a common gate body portion along theType: ApplicationFiled: December 2, 2022Publication date: June 8, 2023Inventors: Aryan Afzalian, Julien Ryckaert, Naoto Horiguchi, Boon Teik Chan
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Publication number: 20230178640Abstract: A FET device (100) is provided, the FET device including a substrate (102), a source body (120), a drain body (130) and a set of vertically spaced apart channel layers (150) extending between the source and drain body in a first direction along the substrate (102), the source body (120) comprising a common source body portion (122) arranged at a first lateral side of the set of channel layers (150) and a set of vertically spaced apart source prongs (124) protruding from the common source body portion (122) in a second direction along the substrate (102), transverse to the first direction, the drain body (130) comprising a common source body portion (132) arranged at the first lateral side of the set of channel layers (150) and a set of drain prongs (134) protruding from the common drain body portion (132) in the second direction; and a gate body (140) comprising a common gate body portion (142) arranged at a second lateral side of the channel layer (150), opposite the first lateral side, and a set of gate proType: ApplicationFiled: December 1, 2022Publication date: June 8, 2023Inventors: Aryan Afzalian, Julien Ryckaert, Naoto Horiguchi
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Publication number: 20220115523Abstract: According to an aspect of the present inventive concept there is provided a field-effect transistor and a method for controlling such. The transistor comprises: a semiconductor layer; a source terminal, a drain terminal and a single gate. The source and drain terminals are arranged on a first side of the semiconductor layer and the gate is arranged on a second side of the semiconductor layer opposite the first side. The gate and the source terminal are arranged to overlap with a first common region of the semiconductor layer and the gate and the drain terminal are arranged to overlap with a second common region of the semiconductor layer. The semiconductor layer further comprises a first gap region and a second gap region which the gate does not overlap. The gate is configured to induce an electrostatic doping of the first and second common regions and induce a channel in a channel region of the semiconductor layer, extending between the first and second common regions.Type: ApplicationFiled: October 7, 2021Publication date: April 14, 2022Inventor: Aryan AFZALIAN
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Patent number: 11264452Abstract: A transistor device includes a channel, a first source/drain region positioned on a first side of the channel, a second source/drain region positioned on a second side of the channel opposite the first side of the channel, and a tunnel barrier disposed between the channel and the first source/drain region, the tunnel barrier adapted to suppress band-to-band tunneling while the transistor device is in an off state.Type: GrantFiled: December 29, 2015Date of Patent: March 1, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventor: Aryan Afzalian
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Publication number: 20210288168Abstract: A semiconductor device includes first and second source/drain regions, a core channel region, a barrier layer, a shell, and a gate stack. The core channel region is between the first and second source/drain regions and is doped with first dopants. The barrier layer is between the core channel region and the second source/drain region and is doped with second dopants. The shell is over the core channel region and the barrier layer. The gate stack is over the shell.Type: ApplicationFiled: May 28, 2021Publication date: September 16, 2021Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Aryan AFZALIAN
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Publication number: 20210280675Abstract: A method for manufacturing a semiconductor device includes forming a source and region in a substrate. A core channel region is formed adjacent the source region. A barrier layer is formed adjacent the core channel region. A drain region is formed in the substrate such that the barrier layer is between the core channel region and the drain region. A first portion of a shell is formed along the core channel region. A second portion of the shell is formed along the barrier layer. The second portion of the shell includes a different material than the first portion of the shell.Type: ApplicationFiled: May 21, 2021Publication date: September 9, 2021Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Aryan AFZALIAN
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Patent number: 11024729Abstract: A method for manufacturing a semiconductor device includes forming a first source/drain region in a substrate. A core channel region is formed on the first source/drain region. A barrier layer is formed on the core channel region. A shell is formed lining sidewalls of the core channel region and sidewalls and top surface of the barrier layer. The shell includes a channel portion in contact with the core channel region and a barrier portion in contact with the barrier layer. A second source/drain region is formed above the shell. A first gate electrode is formed to surround the channel portion of the shell. A conduction energy band of the channel portion of the shell is aligned with a conduction energy band of the barrier portion of the shell.Type: GrantFiled: March 19, 2019Date of Patent: June 1, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTDInventor: Aryan Afzalian
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Patent number: 11018226Abstract: A semiconductor device includes a source region, a drain region, a core channel region, and a barrier layer. The core channel region is between the source region and the drain region. The barrier layer is between the core channel region and the drain region. The barrier layer is a graded doped barrier layer.Type: GrantFiled: April 29, 2019Date of Patent: May 25, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Aryan Afzalian
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Patent number: 10896974Abstract: A method for fabricating a semiconductor device includes forming a channel region in a semiconductor substrate. The channel region is made of a first material. The method also includes forming source and drain regions in the semiconductor substrate. The method further includes forming a recess between the channel region and the drain region. The method further includes forming a tunnel barrier layer in the recess. The tunnel barrier layer is made of a second material, and a bandgap of the second material is greater than a bandgap of the first material. The method further includes forming a gate stack on the channel region.Type: GrantFiled: November 15, 2019Date of Patent: January 19, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Aryan Afzalian
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Patent number: 10861962Abstract: A method includes forming a source region in a semiconductor substrate, in which the source region has a first type dopant. A channel region is formed in the semiconductor substrate and next to the source region. A drain region is formed in the semiconductor substrate, in which the drain region has a second type dopant different from the first type dopant. A heavily doped region is formed between the source region and the channel region, in which the heavily doped region has the first type dopant, and a dopant concentration of the first type dopant in the heavily doped region is higher than a dopant concentration of the first type dopant in the source region. A gate structure is formed over the channel region. A first low-k spacer is formed extending downwardly along a first sidewall of the gate structure to a top surface of the heavily doped region.Type: GrantFiled: November 8, 2019Date of Patent: December 8, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Aryan Afzalian
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Publication number: 20200105914Abstract: A semiconductor device includes first and second source/drain regions, a core channel region, a barrier layer, a shell, and a gate stack. The core channel region is between the first and second source/drain regions and is doped with first dopants. The barrier layer is between the core channel region and the second source/drain region and is doped with second dopants. The shell is over the core channel region and the barrier layer. The gate stack is over the shell.Type: ApplicationFiled: March 19, 2019Publication date: April 2, 2020Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Aryan AFZALIAN
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Publication number: 20200091321Abstract: A method for fabricating a semiconductor device includes forming a channel region in a semiconductor substrate. The channel region is made of a first material. The method also includes forming source and drain regions in the semiconductor substrate. The method further includes forming a recess between the channel region and the drain region. The method further includes forming a tunnel barrier layer in the recess. The tunnel barrier layer is made of a second material, and a bandgap of the second material is greater than a bandgap of the first material. The method further includes forming a gate stack on the channel region.Type: ApplicationFiled: November 15, 2019Publication date: March 19, 2020Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Aryan AFZALIAN
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Publication number: 20200075749Abstract: A method includes forming a source region in a semiconductor substrate, in which the source region has a first type dopant. A channel region is formed in the semiconductor substrate and next to the source region. A drain region is formed in the semiconductor substrate, in which the drain region has a second type dopant different from the first type dopant. A heavily doped region is formed between the source region and the channel region, in which the heavily doped region has the first type dopant, and a dopant concentration of the first type dopant in the heavily doped region is higher than a dopant concentration of the first type dopant in the source region. A gate structure is formed over the channel region. A first low-k spacer is formed extending downwardly along a first sidewall of the gate structure to a top surface of the heavily doped region.Type: ApplicationFiled: November 8, 2019Publication date: March 5, 2020Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Aryan AFZALIAN
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Publication number: 20200058738Abstract: A semiconductor device includes a source region, a drain region, a core channel region, and a barrier layer. The core channel region is between the source region and the drain region, The barrier layer is between the core channel region and the drain region, The barrier layer is a graded doped barrier layer.Type: ApplicationFiled: April 29, 2019Publication date: February 20, 2020Inventor: Aryan AFZALIAN
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Patent number: 10541303Abstract: Semiconductor devices and methods of forming the same are provided. A semiconductor device includes a substrate having a fin. A first nanowire is disposed on the fin and a second nanowire is disposed on the fin, the second nanowire being laterally separated from the first nanowire. A gate structure extends around the first nanowire and the second nanowire. The gate structure also extends over a top surface of the fin. The first nanowire, the second nanowire, and the fin form a channel of a transistor.Type: GrantFiled: June 1, 2018Date of Patent: January 21, 2020Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Aryan Afzalian, Blandine Duriez, Mark van Dal
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Patent number: 10483380Abstract: A semiconductor device includes a source region having a first dopant and a drain region having a second dopant. The first dopant is different from the second dopant. A channel region is in between the source and drain region. The channel region is intrinsic. A tunnel barrier layer disposed in between the drain region and the channel region. A gate stack disposed on the channel region. The source region comprises GaSb, the drain region comprises InAs, the channel region comprises InAs, and the tunnel barrier layer comprises InGaAs. The gate stack wraps around the channel region and partially overlaps the tunnel barrier layer.Type: GrantFiled: July 21, 2017Date of Patent: November 19, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Aryan Afzalian
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Patent number: 10475908Abstract: A semiconductor device includes a channel region, a source region having a first type semiconductor and a drain region having a second type semiconductor on opposing sides of the channel region. A gate stack is disposed over the channel region. A low-k spacer is disposed over the source region and abreast the gate stack. The source region includes a first type dopant, and the drain region includes a second type dopant. A pocket is disposed between the channel region and the source region. The pocket has the first type semiconductor and a higher first type dopant concentration than a first type dopant concentration of the source region.Type: GrantFiled: July 26, 2017Date of Patent: November 12, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Aryan Afzalian
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Patent number: 10276566Abstract: A method and structure for suppressing band-to-band tunneling current in a semiconductor device having a high-mobility channel material includes forming a channel region adjacent to and in contact with one of a source region and a drain region. A tunnel barrier layer may be formed such that the tunnel barrier layer is interposed between, and in contact with, the channel region and one of the source region and the drain region. In some embodiments, a gate stack is then formed over at least the channel region. In various examples, the tunnel barrier layer includes a first material, and the channel region includes a second material different than the first material. In some embodiments, the semiconductor device may be oriented in one of a horizontal or vertical direction, and the semiconductor device may include one of a single-gate or multi-gate device.Type: GrantFiled: November 10, 2017Date of Patent: April 30, 2019Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Aryan Afzalian