Patents by Inventor Asaka FUJIKAWA

Asaka FUJIKAWA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR FORMING TITANIUM NITRIDE FILM AND APPARATUS FOR FORMING TITANIUM NITRIDE FILM
    Publication number: 20230030762
    Abstract: A method of forming a titanium nitride film on a substrate. The method includes: performing treatment of changing hydrophilicity of a base film formed on a substrate including a surface on which the base film capable of having its hydrophilicity changed is formed; and forming a titanium nitride film by vapor phase growth on a top surface of the base film subjected to the treatment of changing the hydrophilicity.
    Type: Application
    Filed: July 14, 2022
    Publication date: February 2, 2023
    Inventors: Kensuke HIGUCHI, Asaka FUJIKAWA, Tsuyoshi TAKAHASHI