Patents by Inventor Ashok L. Nalamwar

Ashok L. Nalamwar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma passivation technique for the prevention of post-etch corrosion of plasma-etched aluminum films
    Patent number: 4325984
    Abstract: A method for preventing the post-etch corrosion of aluminum or aluminum alloy film which has been etched utilizing chlorinated plasma wherein the etched film is exposed to fluorinated plasma.
    Type: Grant
    Filed: July 28, 1980
    Date of Patent: April 20, 1982
    Assignee: Fairchild Camera & Instrument Corp.
    Inventors: Christopher H. Galfo, Ashok L. Nalamwar
  • Microacoustic shear bulk wave device
    Patent number: 4101852
    Abstract: A microacoustic signal processing device for propagation of shear bulk waves in a substrate. A preferred embodiment of the device includes a substrate having opposed, polished principal and second surfaces. An input interdigital transducer supported on the principal surface includes a plurality of aluminum electrodes photoetched on the principal surface; a ZnO layer overlying the electrodes; and a conductive aluminum film overlying the ZnO layer. Shear bulk waves propagated by the input transducer are available for processing at various locations on the principal and second surfaces of the substrate.
    Type: Grant
    Filed: September 21, 1976
    Date of Patent: July 18, 1978
    Assignee: Northwestern University
    Inventors: Max Epstein, Ashok L. Nalamwar