Abstract: An inspection system is disclosed. The inspection system includes a shared memory configured to receive image data from a defect inspection tool and a controller communicatively coupled to the shared memory. The controller includes a host image module configured to apply one or more general-purpose defect-inspection algorithms to the image data using central-processing unit (CPU) architectures, a results module configured to generate inspection data for defects identified by the host image module, and secondary image module(s) configured to apply one or more targeted defect-inspection algorithms to the image data. The secondary image module(s) employ flexible sampling of the image data to match a data processing rate of the host image module within a selected tolerance. The flexible sampling of the image data is adjusted responsive to the inspection data generated by the results module and the host image module.

Abstract: Defects from a hot scan can be saved, such as on persistent storage, random access memory, or a split database. The persistent storage can be patch-based virtual inspector virtual analyzer (VIVA) or local storage. Repeater defect detection jobs can determined and the wafer can be inspected based on the repeater defect detection jobs. Repeater defects can be analyzed and corresponding defect records to the repeater defects can be read from the persistent storage. These results may be returned to the high level defect detection controller.

Abstract: An inspection system is disclosed. The inspection system includes a shared memory configured to receive image data from a defect inspection tool and a controller communicatively coupled to the shared memory. The controller includes a host image module configured to apply one or more general-purpose defect-inspection algorithms to the image data using central-processing unit (CPU) architectures, a results module configured to generate inspection data for defects identified by the host image module, and secondary image module(s) configured to apply one or more targeted defect-inspection algorithms to the image data. The secondary image module(s) employ flexible sampling of the image data to match a data processing rate of the host image module within a selected tolerance. The flexible sampling of the image data is adjusted responsive to the inspection data generated by the results module and the host image module.

Abstract: Defects from a hot scan can be saved, such as on persistent storage, random access memory, or a split database. The persistent storage can be patch-based virtual inspector virtual analyzer (VIVA) or local storage. Repeater defect detection jobs can determined and the wafer can be inspected based on the repeater defect detection jobs. Repeater defects can be analyzed and corresponding defect records to the repeater defects can be read from the persistent storage. These results may be returned to the high level defect detection controller.

Abstract: Defects from a hot scan can be saved, such as on persistent storage, random access memory, or a split database. The persistent storage can be patch-based virtual inspector virtual analyzer (VIVA) or local storage. Repeater defect detection jobs can determined and the wafer can be inspected based on the repeater defect detection jobs. Repeater defects can be analyzed and corresponding defect records to the repeater defects can be read from the persistent storage. These results may be returned to the high level defect detection controller.

Abstract: Systems and methods for detecting defects on a reticle are provided. One system includes computer subsystem(s) that include one or more image processing components that acquire images generated by an inspection subsystem for a wafer, a main user interface component that provides information generated for the wafer and the reticle to a user and receives instructions from the user, and an interface component that provides an interface between the one or more image processing components and the main user interface. Unlike currently used systems, the one or more image processing components are configured for performing repeater defect detection by applying a repeater defect detection algorithm to the images acquired by the one or more image processing components, and the repeater defect detection algorithm is configured to detect defects on the wafer using a hot threshold and to identify the defects that are repeater defects.

Abstract: Defects from a hot scan can be saved, such as on persistent storage, random access memory, or a split database. The persistent storage can be patch-based virtual inspector virtual analyzer (VIVA) or local storage. Repeater defect detection jobs can determined and the wafer can be inspected based on the repeater defect detection jobs. Repeater defects can be analyzed and corresponding defect records to the repeater defects can be read from the persistent storage. These results may be returned to the high level defect detection controller.

Abstract: Systems and methods for detecting defects on a reticle are provided. One system includes computer subsystem(s) that include one or more image processing components that acquire images generated by an inspection subsystem for a wafer, a main user interface component that provides information generated for the wafer and the reticle to a user and receives instructions from the user, and an interface component that provides an interface between the one or more image processing components and the main user interface. Unlike currently used systems, the one or more image processing components are configured for performing repeater defect detection by applying a repeater defect detection algorithm to the images acquired by the one or more image processing components, and the repeater defect detection algorithm is configured to detect defects on the wafer using a hot threshold and to identify the defects that are repeater defects.

Abstract: A computer implemented method and apparatus for reconstructing indexed color spaces. The method comprises accessing a plurality of indexed color spaces, wherein each indexed color space comprises a bit depth; and creating one or more unions of two or more indexed color spaces from the plurality of indexed color spaces, wherein the bit depth of the union of the two or more indexed color does not exceed the bit depth of any of the two or more indexed color spaces.

Abstract: A computer implemented method and apparatus for reconstructing indexed color spaces. The method comprises accessing a plurality of indexed color spaces, wherein each indexed color space comprises a bit depth; and creating one or more unions of two or more indexed color spaces from the plurality of indexed color spaces, wherein the bit depth of the union of the two or more indexed color does not exceed the bit depth of any of the two or more indexed color spaces.

Abstract: A method and apparatus for performing file services using cloud computing comprises receiving, from a client computer, at least one parameter of a file resident on the client computer and a task to be performed upon the file. In view of the task, creating a virtual file based on the at least one parameter of the file, and dividing the virtual file into a plurality of data chunks. The method identifies a byte range within the virtual file associated with the task and at least one corresponding data chunk from the plurality of data chunks that is within the byte range. The method requests the corresponding data chunk(s) from the client computer, receives the corresponding data chunk(s) from the client, processes the corresponding data chunk(s) in accordance with the task, and sends the processed corresponding data chunk(s) to the client computer.

Abstract: A method and apparatus for performing file services using cloud computing comprises receiving, from a client computer, at least one parameter of a file resident on the client computer and a task to be performed upon the file. In view of the task, creating a virtual file based on the at least one parameter of the file, and dividing the virtual file into a plurality of data chunks. The method identifies a byte range within the virtual file associated with the task and at least one corresponding data chunk from the plurality of data chunks that is within the byte range. The method requests the corresponding data chunk(s) from the client computer, receives the corresponding data chunk(s) from the client, processes the corresponding data chunk(s) in accordance with the task, and sends the processed corresponding data chunk(s) to the client computer.