Abstract: A layered hinge design providing an improved shock and vibration performance for a two-axis MEMS Micromirror featuring combs drive actuation with independent drive and control for rotating the Micromirror along two-axis of rotation. The two-axis MEMS Micromirror is fabricated using Double SOI wafer as the primary starting material. In addition, a plurality of actuation voltages are driven via conductive layers forming one or more hinges allowing the Micromirror to rotate along the two-axis of rotation. The layered hinge design achieves set angles that are highly stable over time and provides a robust and reliable micromirror that is easy to drive with multiple DC voltages, and moderately insensitive to temperature, shock and vibration.

Abstract: Two-axis MEMS Micromirror is disclosed featuring combs drive actuation with independent drive for each of two axes of rotation and a layered hinge design providing an improved shock and vibration performance. The two-axis MEMS Micromirror is fabricated using Double SOI wafer as the primary starting material. In addition, actuation voltages are driven to an inner axis through multiple layers in one or more outer hinges, allowing for a robust and reliable micromirror that is easy to drive with multiple DC voltages, and moderately insensitive to temperature, shock and vibration. Furthermore, this novel design achieves set angles that are highly stable over time.

Abstract: A tilting mirror MEMS variable optical attenuator attenuates light over a band of wavelengths with minimum wavelength dependent loss. The attenuator includes a lens that has a wedged input face and is made from a material that has high dispersion. The lens design causes different wavelengths to travel different paths through the attenuator such that wavelength dependent loss is reduced. The attenuator may be designed to have minimum wavelength dependent loss at a specified attenuation greater than zero.

Abstract: The present invention combines electrostatic comb with parallel plate actuation in a novel design to create a robust low voltage MEMS Micromirror. Other unique advantages of the invention include the ability to close the comb fingers for additional reliability and protection during mirror snapping with over voltage.

Abstract: The present invention combines electrostatic comb with parallel plate actuation in a novel design to create a robust low voltage MEMS Micromirror. Other unique advantages of the invention include the ability to close the comb fingers for additional reliability and protection during mirror snapping with over voltage.

Abstract: A 1×N wavelength selective switch which can function as a dynamic channel equalizer when N=1. In an exemplary arrangement, the present invention is a free-space device that includes a linear array of micromachined reflective elements for beam steering of individual wavelength channels. In at least some embodiments the array of reflective elements of the present invention provides a substantially seamless design such that the optical spectrum appears flat across the transition between actuators. Various embodiments provide high channel bandwidth with flat-top channel performance, low polarization dependence loss, low vibration sensitivity, extinction ratios greater than 40 dB over all temperatures, and very low levels of electrical and optical channel cross-talk.

Abstract: A tilting mirror MEMS variable optical attenuator attenuates light over a band of wavelengths with minimum wavelength dependent loss. The attenuator includes a lens that has a wedged input face and is made from a material that has high dispersion. The lens design causes different wavelengths to travel different paths through the attenuator such that wavelength dependent loss is reduced. The attenuator may be designed to have minimum wavelength dependent loss at a specified attenuation greater than zero.

Abstract: A tilting mirror MEMS variable optical attenuator attenuates light over a band of wavelengths with minimum wavelength dependent loss. The attenuator includes a lens that has a wedged input face and is made from a material that has high dispersion. The lens design causes different wavelengths to travel different paths through the attenuator such that wavelength dependent loss is reduced. The attenuator may be designed to have minimum wavelength dependent loss at a specified attenuation greater than zero.

Abstract: A 1×N wavelength selective switch which can function as a dynamic channel equalizer when N=1. In an exemplary arrangement, the present invention is a free-space device that includes a linear array of micromachined reflective elements for beam steering of individual wavelength channels. In at least some embodiments the array of reflective elements of the present invention provides a substantially seamless design such that the optical spectrum appears flat across the transition between actuators. Various embodiments provide high channel bandwidth with flat-top channel performance, low polarization dependence loss, low vibration sensitivity, extinction ratios greater than 40 dB over all temperatures, and very low levels of electrical and optical channel cross-talk.

Abstract: A 1×N wavelength selective switch which can function as a dynamic channel equalizer when N=1. In an exemplary arrangement, the present invention is a free-space device that includes a linear array of micromachined reflective elements for beam steering of individual wavelength channels. In at least some embodiments the array of reflective elements of the present invention provides a substantially seamless design such that the optical spectrum appears flat across the transition between actuators. Various embodiments provide high channel bandwidth with flat-top channel performance, low polarization dependence loss, low vibration sensitivity, extinction ratios greater than 40 dB over all temperatures, and very low levels of electrical and optical channel cross-talk.

Abstract: A 1×N wavelength selective switch which can function as a dynamic channel equalizer when N=1. In an exemplary arrangement, the present invention is a free-space device that includes a linear array of micromachined reflective elements for beam steering of individual wavelength channels. In at least some embodiments the array of reflective elements of the present invention provides a substantially seamless design such that the optical spectrum appears flat across the transition between actuators. Various embodiments provide high channel bandwidth with flat-top channel performance, low polarization dependence loss, low vibration sensitivity, extinction ratios greater than 40 dB over all temperatures, and very low levels of electrical and optical channel cross-talk.

Abstract: A tilting mirror MEMS variable optical attenuator attenuates light over a band of wavelengths with minimum wavelength dependent loss. The attenuator includes a lens that has a wedged input face and is made from a material that has high dispersion. The lens design causes different wavelengths to travel different paths through the attenuator such that wavelength dependent loss is reduced. The attenuator may be designed to have minimum wavelength dependent loss at a specified attenuation greater than zero.

Abstract: A 1×N wavelength selective switch which can function as a dynamic channel equalizer when N=1. In an exemplary arrangement, the present invention is a free-space device that includes a linear array of micromachined reflective elements for beam steering of individual wavelength channels. In at least some embodiments the array of reflective elements of the present invention provides a substantially seamless design such that the optical spectrum appears flat across the transition between actuators. Various embodiments provide high channel bandwidth with flat-top channel performance, low polarization dependence loss, low vibration sensitivity, extinction ratios greater than 40 dB over all temperatures, and very low levels of electrical and optical channel cross-talk.

Abstract: A simple and robust heat actuated steering device for use with mirrors and other optical components of optical telecommunications equipment is described, together with systems which implement such devices. The device uses differential heating between two legs of a flexured mount to allow tilting that can be used to steer an optical beam. Disturbances in the optical alignment, caused by temperature changes, of an optical device containing this component can be compensated by measuring the device temperature and using this to determine a command signal, for example as provided through a lookup table, to correct for device misalignment. Techniques for calibrating the device and establishing the correction data are also disclosed.

Abstract: A beam refraction apparatus includes an input fiber carrying an input beam. A wavelength dispersive element is coupled to the input fiber. The wavelength dispersive element spreads the input beam in at least one dimension as a function of wavelength and generates a dispersed beam. A controllable grating reflects the dispersed beam to the wavelength dispersive element and generates a recombined beam. The controllable grating provides a controllable reflectivity as a function of wavelength. An output fiber receives the recombined beam. A collimating optical member is coupled to the input and output fibers. The collimating optical member passes the input beam and the recombined beams in parallel and opposite directions.

Abstract: The present invention is directed towards dynamic spectral shaping. Using a grating, the spectral band is spread across a MEMS or other suitable device array. The device may be the deformable grating modulator invented by Bloom et. al. (U.S. Pat. No. 5,311,360) or other suitable device. The invention also includes the coupling in and out of the fiber and may use polarization optics to ensure the grating is used in only one polarization where the diffraction efficiency is higher.

Abstract: Various embodiments are disclosed of apparatuses and methods for linearization. A linearized signal can control, for example, a microelectromechanical device, a microelectromechanical device, and/or a device controlling a modulated intensity of electromagnetic energy. Some embodiments include linearization functions such as a logarithm or x/(a+x).

Abstract: A design for a 1×N Optical Wavelength Switch incorporates mode conditioning optics which allows seamless control between actuators thus making possible increased channel count (decreasing the channel grid from 100 GHz to 50 GHz) and combining optical channels into groups which can be controlled as a band. In an exemplary embodiment, a new device referred to herein as a Diffractive Steering Element (DSE) is used to implement the invention in a 1×N wavelength selective switch which provides power equalization on a channel-by-channel basis.

Abstract: A fiber-optic modulator based on a micromachined grating device which is both polarization independent and achromatic in behavior is described. The device is a two dimensional grating or periodic structure which is symmetric in the X and Y axes. It is comprised of a membrane with holes cut in it that moves downward with the application of a voltage which starts diffracting light. The hole region may have a raised island to provide achromatic behavior.

Abstract: A fiber-optic modulator based on a micromachined grating device which is both polarization independent and achromatic in behavior is described. The device is a two dimensional grating or periodic structure which is symmetric in the X and Y axes. It is comprised of a membrane with holes cut in it that moves downward with the application of a voltage which starts diffracting light. The hole region may have a raised island to provide achromatic behavior.