Abstract: An etching method includes (a) providing a substrate including a first region and a second region below the first region, the first region containing a first material and including an opening, the second region containing a second material different from the first material, the second material containing silicon; (b) forming a metal-containing deposition on the first region by using first plasma generated from a first process gas containing halogen, metal, and at least one of carbon or hydrogen; and (c) after (b), etching the second region via the opening by using second plasma generated from a second process gas different from the first process gas.

Abstract: A plasma processing method executed by a plasma processing apparatus with a chamber is provided. The method includes (a) providing in the chamber a substrate that includes an etching film and a mask film, the substrate including a first region where the etching film is exposed and a second region where the mask film is exposed, (b) supplying into the chamber a processing gas including a carbon-containing gas to generate plasma from the processing gas to etch the etching film and to form a protective film on the mask film, and (c) supplying the processing gas into the chamber to generate plasma from the processing gas to further etch the etching film and to remove at least part of the protective film.

Abstract: There is provided an air pump in which vibration noise generated in a drive unit of the pump is suppressed from being transmitted to the outside through a suction passage. A casing of the air pump has a suction port extending from an outer peripheral surface to inner peripheral surface of the casing, a noise reduction wall annularly formed on the outer peripheral surface of the casing such that the suction port opens in a region of the outer peripheral surface of the casing surrounded by the noise reduction wall, and a lid member closing the opening of the top of the noise reduction wall and cooperating with the noise reduction wall and the outer peripheral surface of the casing to define a noise reduction chamber communicating with the suction port. The noise reduction wall has an elongated noise reduction passage extending circumferentially in the noise reduction wall.

Abstract: An air pump has an air tank (20) for temporarily storing air from a pump unit (12) before discharging the air. The air tank has a tank body having a top wall (40) on which the pump unit is placed, and a peripheral wall (42) extending downward from the top wall. The tank body has a downward facing opening. The air tank further has a metallic bottom wall member (46) engaged with the bottom surface of the peripheral wall so as to close the opening of the tank body. Bolts are passed through the metallic bottom wall member and into a metallic part of the pump unit and tightened to connect and secure the pump unit and the air tank to each other.

Abstract: An air pump has an air tank (20) for temporarily storing air from a pump unit (12) before discharging the air. The air tank has a tank body having a top wall (40) on which the pump unit is placed, and a peripheral wall (42) extending downward from the top wall. The tank body has a downward facing opening. The air tank further has a metallic bottom wall member (46) engaged with the bottom surface of the peripheral wall so as to close the opening of the tank body. Bolts are passed through the metallic bottom wall member and into a metallic part of the pump unit and tightened to connect and secure the pump unit and the air tank to each other.

Abstract: There is provided an air pump in which vibration noise generated in a drive unit of the pump is suppressed from being transmitted to the outside through a suction passage. A casing (17) of the air pump has a suction port (26-12) extending from an outer peripheral surface to inner peripheral surface of the casing, a noise reduction wall (26-9) annularly formed on the outer peripheral surface of the casing such that the suction port opens in a region of the outer peripheral surface of the casing surrounded by the noise reduction wall, and a lid member closing the opening of the top of the noise reduction wall and cooperating with the noise reduction wall and the outer peripheral surface of the casing to define a noise reduction chamber (26-14) communicating with the suction port. The noise reduction wall has an elongated noise reduction passage (26-11) extending circumferentially in the noise reduction wall. One end of the noise reduction passage opens on the outer surface of the noise reduction wall.

Abstract: An electromagnetic diaphragm pump has two compression sections operated by an AC. Each of the compression sections comprises an oscillator disposed within a housing and holding a permanent magnet, a pair of diaphragms each having a peripheral portion fixed to the housing and a central portion fixed to an end portion of the oscillator, a pair of field cores sandwiching the oscillator and having magnetic poles displaced relative to the permanent magnet by a predetermined amount, coils for producing magnetic fluxes at the field cores, and compression chambers opposed to end portions of the oscillator, one of walls of each of the compression chambers being formed by an associated one of the diaphragms. The field cores have the magnetic poles magnetized by the AC supplied to the coils, whereby the permanent magnet is alternately attracted and repelled by the magnetic poles to vibrate the diaphragms and to vary the volumes of the compression chambers. The two compression chambers share one field core.

Abstract: A remedial device for hand insufficiency includes a glove trank having a foundation and allowing the palm of a hand to be applied thereto, the thumb and fingers of the hand to be fixed to the foundation with finger stoppers, and the wrist and forearm to be fixed to the foundation with an arm stopper; a plurality of first bag bodies accommodating finger-spreading air sacks and disposed on the front side of the foundation; a pair of second bag bodies accommodating joint-extending air sacks and disposed on the back side of the foundation; and a compressed air feed and discharge device for inflating and deflating the air sacks in the first and second bag bodies to effect a spreading of the fingers and an extension and dorsiflexion of hand joints. Each of the second bag bodies includes two bag pieces which are each formed of cloth cut into a foundation.

Abstract: A pump body of a diaphragm pump unit comprises a housing and a pump placed therein, an elastic cover is attached to the housing so as to cover the upper portion of the housing. When the pump is operated with the upper opening of the housing of the pump body being covered with the cover, a fluid such as air is introduced into the housing through an inlet port made therein, flowing into a pressure chamber within the pump body. Since, at this time, the pressure in the housing becomes negative, an attraction force acts on the cover capping the upper portion of the pump body, whereby the cover is put in closer contact with the housing of the pump body to reduce noise leakage.

Abstract: An electromagnetic diaphragm pump, the mounts for positioning and mounting the field cores on the housing and the fitting portions for fitting the peripheral portions of the diaphragms are integrally formed with the housing so that the attaching positions of the field cores never shift after they are attached. Screw holes are formed through the mounts for attaching the field cores to make the attaching and fixing of the field cores easier.

Abstract: A magnet holder for an electromagnetic diaphragm pump comprising a reinforcing member having at least in part thereof a width smaller than the distance between a pair of magnets placed in the predetermined positions in magnet insertion windows is provided integrally with the magnet holder between the pair of magnet insertion windows for juxtaposing and holding a pair of flat plate-shaped magnets in the same plane, so that the mechanical strength of the magnet holder is prevented from decreasing. And positioning members may be formed in the reinforcing member for pressing the pair of magnets inserted into the magnet insertion windows toward the diaphragms attached to opposite ends of the magnet holder, thereby positioning the magnets with enough accuracy and determining the distance between the magnets.

Abstract: A vibrator for diaphragm pump and magnet holder for the vibrator wherein a stopper is formed on the inner perimeter of the side wall of the magnet insertion window in the vicinity of one main plane of the magnet holder, and that the supporting surface of the stopper for the magnet is fixed at the distance of 1/2 of the difference between the thicknesses of the magnet holder and the magnet to be inserted into the magnet insertion window, from the one main plane. A plurality of said stoppers are formed partially along the inner periphery of the magnet insertion window. Recesses are formed in appropriate portions of the perimeter of the magnet insertion window, into which the bonding agent is made to flow.

Abstract: A hand therapeutic appliance, including: a splint cloth with a portion for accommodating a palm with the fingers spread apart, and a portion for covering the underside surface of the carpal joint and forearm; retainers for releasably holding the five spread apart fingers; retainers for releasably securing the wrist and/or forearm to the forearm splint portion; a plurality of first generally delta-shaped pockets positioned between adjacent fingers; a pair of second pockets extending from the finger tips toward the forearm along substantially the full length of the splint cloth, the second pockets span the space between the thumb and the forefinger and the space between the ring finger and the middle finger, respectively; a pair of third generally delta-shaped pockets, one of the third pockets extending between the pair of second pockets from the finger tips toward the wrist to span the forefinger and the middle finger, and the other of the third pockets extending from the finger tips toward the wrist to span t