Patents by Inventor Atsuko Ito, legal representative

Atsuko Ito, legal representative has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Bilayer systems including a polydimethylglutarimide-based bottom layer and compositions thereof
    Patent number: 8323868
    Abstract: Bilayer systems include a bottom layer formed of polydimethylglutarimide, an acid labile dissolution inhibitor and a photoacid generator. The bilayer system can be exposed and developed in a single exposure and development process.
    Type: Grant
    Filed: November 6, 2009
    Date of Patent: December 4, 2012
    Assignee: International Business Machines Corporation
    Inventors: Joy Cheng, Ho-Cheol Kim, Hiroshi Ito, Atsuko Ito, legal representative, Hoa D. Truong
  • Calixarene blended molecular glass photoresists and processes of use
    Patent number: 7993812
    Abstract: Photoresist compositions include a blend of at least one fully protected calix[4]resorcinarene and at least one unprotected calix[4]resorcinarene, wherein the fully protected calix[4]resorcinarene has phenolic groups protected with acid labile protective groups; a photoacid generator; and a solvent, and wherein the blend and the photoacid generator are soluble in the solvent. Also disclosed are processes for generating a resist image on a substrate using the photoresist composition.
    Type: Grant
    Filed: July 23, 2009
    Date of Patent: August 9, 2011
    Assignee: International Business Machines Corporation
    Inventors: Luisa D. Bozano, Hiroshi Ito, Atsuko Ito, legal representative, Linda K. Sundberg