Patents by Inventor Atsunobu Une

Atsunobu Une has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vertical XY stage
    Patent number: 5241183
    Abstract: A vertical XY stage includes a base, an X-axis slider, a Y-axis slider, and a stage. The X-axis slider is movably mounted on the base. The Y-axis slider is movably mounted on the X-axis slider. Workpieces are arranged on the stage. The Y-axis slider includes a horizontally arranged slider main body, and a vertical portion vertically arranged and having a guide for allowing the Y-axis slider to move in a Y-axis direction. The stage is arranged in a space surrounded by the slider main body and the vertical portion of the Y-axis slider. The stage can be pivoted through a shaft mounted on the Y-axis slider.
    Type: Grant
    Filed: March 19, 1992
    Date of Patent: August 31, 1993
    Assignee: Nippon Telegraph and Telephone Corporation
    Inventors: Munenori Kanai, Sunao Ishihara, Atsunobu Une
  • Method of alignment with the use of diffraction gratings and an apparatus therefor
    Patent number: 5000573
    Abstract: In a method of measuring/adjusting a relative displacement of objects using diffraction gratings, two monochromatic beams each having slightly different frequencies are synthesized to cause optical heterodyne interference so as to generate two beat signals. One of the beat signals is used as a reference signal. The other is used as a first interference beat signal generated by emitting the two monochromatic beams on a first diffraction grating arranged on a first object and by synthesizing two diffracted beams generated from the first diffraction grating by the above emission to cause optical heterodyne interference. A phase difference between the reference beat signal and the interference beat signal is then detected. Finally, the relative displacement is measured/adjusted in accordance with the phase difference.
    Type: Grant
    Filed: March 12, 1990
    Date of Patent: March 19, 1991
    Assignee: Nippon Telegraph and Telephone Corporation
    Inventors: Masanori Suzuki, Makoto Iki, Atsunobu Une
  • Diffraction grating position adjuster using a grating and a reflector
    Patent number: 4656347
    Abstract: A method of adjusting a relative positional relationship between two objects uses a diffraction grating. A first diffraction grating is arranged on a first object located to oppose a second object, a reflecting surface is arranged at a position of the second object which corresponds to the first diffraction grating, and the method includes the step of irradiating the first diffraction grating with a radiation beam of coherent light or quasi-monochromatic light and measuring/setting the gap between the first and second objects in accordance with a change in intensity of one of the diffracted light components from the first diffraction grating.
    Type: Grant
    Filed: January 28, 1985
    Date of Patent: April 7, 1987
    Assignee: Nippon Telegraph & Telephone Public Corporation
    Inventors: Atsunobu Une, Makoto Iki, Nobuyuki Takeuchi, Kimiyoshi Deguchi