Abstract: There is provided a process of forming a film containing a metal element, an additional element different from the metal element and at least one of nitrogen and carbon on a substrate by performing a cycle a predetermined number of times, the cycle including non-simultaneously performing: (a) supplying a first precursor gas containing the metal element and a second precursor gas containing the additional element to the substrate so that supply periods of the first precursor gas and the second precursor gas at least partially overlap with each other; and (b) supplying a reaction gas containing the at least one of nitrogen and carbon to the substrate.

Abstract: There is provided a method of manufacturing a semiconductor device, including forming a metal nitride film substantially not containing a silicon atom on a substrate by sequentially repeating: (a) supplying a metal-containing gas and a reducing gas, which contains silicon and hydrogen and does not contain a halogen, to the substrate in a process chamber by setting an internal pressure of the process chamber to a value which falls within a range of 130 Pa to less than 3,990 Pa during at least the supply of the reducing gas, wherein (a) includes a timing of simultaneously supplying the metal-containing gas and the reducing gas; (b) removing the metal-containing gas and the reducing gas that remain in the process chamber; (c) supplying a nitrogen-containing gas to the substrate; and (d) removing the nitrogen-containing gas remaining in the process chamber.

Abstract: A client means and a Web server means perform data communication with each other over the Internet according to HTTP. A spreadsheet program, which is a program for displaying cell data in a table frame in which cells are arranged in at least one of the row direction and the column direction, has a function of generating a table frame and cell data as an HTML file. In response to a request from a browser, a spreadsheet assisting means causes the spreadsheet program to generate a table frame and cell data as an HTML file. A database means stores and manages, as records, cell data groups to be displayed in table frames.

Abstract: An integrated database system and a computer-readable recording medium recorded with a program for managing a database structure thereof which reduce work load and work cost by a relational database and a nonrelational database being integrated into a single system comprising storing means holding a database wherein a single record is made up of a record part of a relational database and a record part of a nonrelational database and the record part of the nonrelational database is made up of a parent record part only or a parent record part and at least one child record part linked to the parent record part and processing means for carrying out relational operation and data manipulation on the database.

Abstract: A virtual database space system realizable with a database program makes it possible to obtain a maximum throughput of database manipulations even when different types of transaction are mixed; can be started normally after a failure and thus eliminates the necessity for the user to be aware of the concept of recovery and as seen by the user has a very large logically nonvolatile virtual database space; and makes it possible for updates of the database to be accepted during the copying of a backup.