Abstract: A reaction tube for a semiconductor process for performing a heat process on a plurality of target objects stacked at intervals under a vacuum state is integrally made of an electrically insulating and heat-resistant material. The reaction tube includes a cylindrical sidewall that has a load port at a lower end for loading and unloading the target objects to and from the reaction tube, and a circular ceiling wall that closes an upper end of the sidewall and has a flat inner surface extending in a direction perpendicular to an axial direction of the sidewall. The ceiling wall has an annular groove formed in a peripheral region of an outer surface along the sidewall.

Abstract: A reaction tube for a semiconductor process for performing a heat process on a plurality of target objects stacked at intervals under a vacuum state is integrally made of an electrically insulating and heat-resistant material. The reaction tube includes a cylindrical sidewall that has a load port at a lower end for loading and unloading the target objects to and from the reaction tube, and a circular ceiling wall that closes an upper end of the sidewall and has a flat inner surface extending in a direction perpendicular to an axial direction of the sidewall. The ceiling wall has an annular groove formed in a peripheral region of an outer surface along the sidewall.

Abstract: A method for forming a silicon oxide film includes disposing a silicon oxide film on a surface of a target substrate, and performing a reformation process on the silicon oxide film. The reformation process is performed by annealing the silicon oxide film while exposing the silicon oxide film to oxygen radicals and hydroxyl group radicals.

Abstract: A method for forming a silicon oxide film includes disposing a silicon oxide film on a surface of a target substrate, and performing a reformation process on the silicon oxide film. The reformation process is performed by annealing the silicon oxide film while exposing the silicon oxide film to oxygen radicals and hydroxyl group radicals.

Abstract: A carriage fixing apparatus in a disk driver detects that the head carriage which moves a head is located at a predetermined position, and then automatically fixes the head carriage by means of mechanically engaging with the head carriage.

Abstract: An optical pick-up device comprises a body, an objective lens provided on the body so as to oppose a recording medium, a laser source for producing a laser beam, a mirror for reflecting the laser beam towards the objective lens, a first table member mounted on the body of the optical pick-up device in which the first table member carries a table part such that the table part can be tilted relative to the body, an adjustment mechanism for adjusting tile of the table part of the first table member relative to the body, a second table member to which the mirror is mounted, and a connecting part of a material having elasticity and capable of absorbing vibration, interposed between the second table member and the table part of the first table member for supporting the second table member relative to the table part of the first table member.