Patents by Inventor Atsushi Hatamoto

Atsushi Hatamoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Shutter unit, lithography apparatus, and method of manufacturing article
    Patent number: 9971248
    Abstract: A shutter unit that opens and closes an optical path of light for a lithography apparatus is provided. The shutter unit includes a motor which rotatably drives a shaft extended along a rotation axis of the motor, and a plurality of shutter members attached to the shaft, each including a light shielding portion and a light transmissive portion. The shutter unit further includes a partition plate arranged at a location between the shutter members to avoid a portion through which a light beam passes and configured to shield light that has leaked from a front stage shutter member.
    Type: Grant
    Filed: February 28, 2017
    Date of Patent: May 15, 2018
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Atsushi Hatamoto
  • SHUTTER UNIT, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
    Publication number: 20170255106
    Abstract: A shutter unit that opens and closes an optical path of light for a lithography apparatus is provided. The shutter unit includes a motor which rotatably drives a shaft extended along a rotation axis of the motor, and a plurality of shutter members attached to the shaft, each including a light shielding portion and a light transmissive portion. The shutter unit further includes a partition plate arranged at a location between the shutter members to avoid a portion through which a light beam passes and configured to shield light that has leaked from a front stage shutter member.
    Type: Application
    Filed: February 28, 2017
    Publication date: September 7, 2017
    Inventor: Atsushi Hatamoto