Abstract: A sample inspection system has line sensors that generate sample picture data for layers of a sample disposed at different depths of the sample. The line sensors are arranged parallel to each other and displaced from each other in a vertical direction relative to the sample. A lens system focuses the layers of the sample at the different sample depths on the respective line sensors so that pictures of the layers at the different sample depths are read as line picture data by the line sensors. The sample inspection system includes an apparatus that stores the generated sample picture data, allows a planar region of the sample to be designated by a user for display, extracts picture data corresponding to the designated planar region for each of the sample layers from the sample picture data in response to designation of the planar region, and stores the extracted picture data as a set.

Abstract: A sample inspection system and method for displaying images of plural sample layers and a predetermined planar region within an image having a very large imaging region. Line sensors generate sample picture data for the plurality of sample layers, a computer stores the generated sample picture data, allows a planar region to be designated by a user for display, extracts picture data corresponding to the designated planar region for each of the respective layers from the sample picture data in response to designation of the planar region, and stores the extracted picture data as a set, and an image processing apparatus for displaying extracted pictures of the respective layers on a display in either an alternative way in which each picture may be selectively displayed individually and alternately, or simultaneously in which two or more of the pictures may be displayed together in a parallel or superposed manner.