Patents by Inventor Atsushi KINJO

Atsushi KINJO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Composite structure, semiconductor manufacturing apparatus and display manufacturing apparatus provided with composite structure
    Patent number: 10759710
    Abstract: Disclosed is provision of a ceramic coat having an excellent low-particle generation as well as a method for assessing the low-particle generation of the ceramic coat. A composite structure including a substrate and a structure which is formed on the substrate and has a surface, wherein the structure includes a polycrystalline ceramic and the composite structure has luminance Sa satisfying a specific value calculated from a TEM image analysis thereof, can be suitably used as an inner member of a semiconductor manufacturing apparatus required to have a low-particle generation.
    Type: Grant
    Filed: March 8, 2019
    Date of Patent: September 1, 2020
    Assignee: Toto Ltd.
    Inventors: Junichi Iwasawa, Hiroaki Ashizawa, Takuma Wada, Ryoto Takizawa, Toshihiro Aoshima, Yuuki Takahashi, Atsushi Kinjo
  • COMPOSITE STRUCTURE, SEMICONDUCTOR MANUFACTURING APPARATUS AND DISPLAY MANUFACTURING APPARATUS PROVIDED WITH COMPOSITE STRUCTURE
    Publication number: 20190276368
    Abstract: Disclosed is provision of a ceramic coat having an excellent low-particle generation as well as a method for assessing the low-particle generation of the ceramic coat. A composite structure including a substrate and a structure which is formed on the substrate and has a surface, wherein the structure includes a polycrystalline ceramic and the composite structure has luminance Sa satisfying a specific value calculated from a TEM image analysis thereof, can be suitably used as an inner member of a semiconductor manufacturing apparatus required to have a low-particle generation.
    Type: Application
    Filed: March 8, 2019
    Publication date: September 12, 2019
    Inventors: Junichi IWASAWA, Hiroaki ASHIZAWA, Takuma WADA, Ryoto TAKIZAWA, Toshihiro AOSHIMA, Yuuki TAKAHASHI, Atsushi KINJO