Patents by Inventor Atsushi Machida
Atsushi Machida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7360426Abstract: An acceleration sensor that suppresses fluctuations in the offset voltage and with an enhanced temperature characteristic is provided. The acceleration sensor comprises an weight that is formed in the center of a semiconductor substrate; a frame that is formed at the circumference of the weight; a beam or diaphragm that connects the weight and frame; a detection element that is formed on the beam or diaphragm and which detects bending of the beam or diaphragm that corresponds with the applied acceleration; and a lead that is formed on the beam or diaphragm and which guides the detection output of the detection element to a pad that is provided on the frame, wherein a dummy lead comprising a plurality of dot patterns which are at least electrically independent of the lead formed on the beam or diaphragm is formed on the beam or diaphragm.Type: GrantFiled: June 17, 2005Date of Patent: April 22, 2008Assignees: Fujitsu Media Devices Limited, Fujitsu LimitedInventors: Atsushi Machida, Sumio Yamada, Hiroshi Tanaka, Hisanori Aizawa, Kenji Nagata, Tsutomu Miyashita, Hiroshi Ishikawa
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Patent number: 7188525Abstract: An angular velocity sensor is provided that includes a frame, an oscillator and torsion bars that connect the oscillator to the frame. The frame, the oscillator and the torsion bar are formed integral with each other by etching a material substrate in the thickness direction of the substrate. The oscillator, configured in the form of an H, includes a support, two first arms and two second arms. These arms extend from the support in an arm-extending direction perpendicular to the thickness direction of the substrate. The oscillator includes a mounting surface that is provided with a piezoelectric driver for generating in-plane oscillation of the oscillator, and with a piezoelectric detector for detecting out-of-plane oscillation of the oscillator.Type: GrantFiled: April 22, 2002Date of Patent: March 13, 2007Assignees: Fujitsu Limited, Fujitsu Media Devices LimitedInventors: Atsushi Machida, Suguru Warashina, Hiroshi Ishikawa, Tsutomu Miyashita, Yoshio Satoh
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Publication number: 20060096379Abstract: An acceleration sensor that suppresses fluctuations in the offset voltage and with an enhanced temperature characteristic is provided. The acceleration sensor comprises an weight that is formed in the center of a semiconductor substrate; a frame that is formed at the circumference of the weight; a beam or diaphragm that connects the weight and frame; a detection element that is formed on the beam or diaphragm and which detects bending of the beam or diaphragm that corresponds with the applied acceleration; and a lead that is formed on the beam or diaphragm and which guides the detection output of the detection element to a pad that is provided on the frame, wherein a dummy lead comprising a plurality of dot patterns which are at least electrically independent of the lead formed on the beam or diaphragm is formed on the beam or diaphragm.Type: ApplicationFiled: June 17, 2005Publication date: May 11, 2006Inventors: Atsushi Machida, Sumio Yamada, Hiroshi Tanaka, Hisanori Aizawa, Kenji Nagata, Tsutomu Miyashita, Hiroshi Ishikawa
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Patent number: 6823735Abstract: In an acceleration sensor including a vibrator subject to a sliding vibration and a weight section connected to the vibrator and supported at a position different from the position of the center of gravity of an assembly of the vibrator and weight section, for detecting an angular moment about the support point, which is produced at the weight section by application of acceleration, as sliding vibration with the vibrator, the acceleration sensor includes a rectangular substrate having a plurality of electrodes electrically connected to the vibrator, a formation pattern of the plurality of electrodes is symmetrical about an axis parallel to at least one side of the substrate, and the plurality of electrodes have substantially equal thickness. Since the formation pattern of the electrodes on the substrate is symmetrical and the respective electrodes have substantially equal thickness, the vibrator that is bonded to this substrate does not incline and the detection sensitivity does not vary.Type: GrantFiled: September 26, 2001Date of Patent: November 30, 2004Assignees: Fujitsu Limited, Fujitsu Media Devices LimitedInventors: Hiroshi Ishikawa, Atsushi Machida
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Publication number: 20030066350Abstract: An angular velocity sensor is provided that includes a frame, an oscillator and torsion bars that connect the oscillator to the frame. The frame, the oscillator and the torsion bar are formed integral with each other by etching a material substrate in the thickness direction of the substrate. The oscillator, configured in the form of an H, includes a support, two first arms and two second arms. These arms extend from the support in an arm-extending direction perpendicular to the thickness direction of the substrate. The oscillator includes a mounting surface that is provided with a piezoelectric driver for generating in-plane oscillation of the oscillator, and with a piezoelectric detector for detecting out-of-plane oscillation of the oscillator.Type: ApplicationFiled: April 22, 2002Publication date: April 10, 2003Applicant: Fujitsu LimitedInventors: Atsushi Machida, Suguru Warashina, Hiroshi Ishikawa, Tsutomu Miyashita, Yoshio Satoh
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Patent number: 6470184Abstract: A mobile communication system includes first and second switching apparatuses, an information channel provided between the first and second switching apparatuses, a plurality of base stations managed by each of the first and second switching apparatuses, and a mobile station. The mobile station can communicate with the first switching apparatus through one of the plurality of base stations managed by the first switching apparatus and with the second switching apparatus through one of the plurality of base stations managed by the second switching apparatus. The first and second switching apparatuses detect traffics therethrough as first and second traffics, respectively, and the second switching apparatus notifies the second traffic to the first switching apparatus via the information channel.Type: GrantFiled: August 30, 1999Date of Patent: October 22, 2002Assignee: NEC CorporationInventor: Atsushi Machida
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Publication number: 20020095990Abstract: In an acceleration sensor including a vibrator subject to a sliding vibration and a weight section connected to the vibrator and supported at a position different from the position of the center of gravity of an assembly of the vibrator and weight section, for detecting an angular moment about the support point, which is produced at the weight section by application of acceleration, as sliding vibration with the vibrator, the acceleration sensor includes a rectangular substrate having a plurality of electrodes electrically connected to the vibrator, a formation pattern of the plurality of electrodes is symmetrical about an axis parallel to at least one side of the substrate, and the plurality of electrodes have substantially equal thickness. Since the formation pattern of the electrodes on the substrate is symmetrical and the respective electrodes have substantially equal thickness, the vibrator that is bonded to this substrate does not incline and the detection sensitivity does not vary.Type: ApplicationFiled: September 26, 2001Publication date: July 25, 2002Applicant: Fujitsu LimitedInventors: Hiroshi Ishikawa, Atsushi Machida