Abstract: A plasma processing apparatus including: a chamber; a plasma generation unit configured to generate a plasma in the chamber; a stage 111 for placing a conveying carrier 10, the stage provided in the chamber; a cover 124 for covering at least part of the conveying carrier placed on the stage; a relative position change unit capable of changing a relative distance between the cover 124 and the stage 111 to a first distance and to a second distance smaller than the first distance; a determination unit configured to determine a placed state of the conveying carrier 10; and a control unit. The determination unit determines the placed state of the conveying carrier while the distance between the cover 124 and the stage 111 is the first distance, and the plasma processing is performed while the distance between the cover 124 and the stage 111 is the second distance.

Abstract: The element chip manufacturing method includes: a preparing process of preparing a substrate 1 including a plurality of element regions EA and a dividing region DA, the substrate 1 having a first principal surface 1X and a second principal surface 1Y; a groove forming process of forming a groove 13 in the dividing region DA from the first principal surface 1X side; and a grinding process of grinding the substrate 1 from the second principal surface 1Y side, to divide the substrate 1 into a plurality of element chips 20. The groove 13 includes a first region 13a constituted by a side surface having a first surface roughness, and a second region 13b constituted by a side surface having a second surface roughness larger than the first surface roughness. In the grinding process, grinding of the substrate 1 is performed until reaching the first region 13a of the groove 13.

Abstract: Disclosed is a method for producing element chips. The method includes: a preparing step of preparing a substrate 10 that is held on a holding sheet 22 that is supported by a frame 21, the substrate including element regions and dicing regions; a protective film forming step of forming a protective film 15 so as to cover the frame 21, the holding sheet 22, and the substrate 10; a patterning step of removing a part of the protective film 15 so as to expose the dicing regions of the substrate 10; a plasma dicing step including a process that uses a plasma that contains fluorine, the plasma dicing step being a step of individualizing the substrate 10 into a plurality of element chips; and a fluorine removing step of removing, together with the protective film 15, fluorine attached to the protective film 15 in the plasma dicing step.

Abstract: An adsorbent of the invention, which is an adsorbent for removing carbonyl sulfide in a stream containing an olefin, contains copper oxide and an aluminum compound, in which a content of the aluminum compound ranges from 10 mass % to 50 mass % in terms of Al, and an NH3 desorption in a temperature region ranging from 100 degrees C. to 200 degrees C. as measured by NH3-TPD measurement is more than 0.001 mmol/g and 1 mmol/g or less.

Abstract: Provided is a technique of producing isoprene from 3-methyl-1,3-butanediol or 1,3-butadiene from 1,3-butanediol by using a single catalyst. A catalyst produces a conjugated diene containing zirconium oxide and calcium oxide in order to produce isoprene by removing two water molecules from one 3-methyl-1,3-butanediol molecule or produce 1,3-butadiene by removing two water molecules from one 1,3-butanediol molecule. Furthermore, a method for producing a conjugated diene includes a step of obtaining a fluid containing a conjugated diene that is isoprene or 1,3-butadiene by bringing a fluid containing 3-methyl-1,3-butanediol or a fluid containing 1,3-butanediol into contact with the catalyst for producing a conjugated diene as a single catalyst so as to cause a dehydration reaction to proceed.

Abstract: Provided is a technique of producing isoprene from 3-methyl-1,3-butanediol or 1,3-butadiene from 1,3-butanediol by using a single catalyst. A catalyst produces a conjugated diene containing zirconium oxide and calcium oxide in order to produce isoprene by removing two water molecules from one 3-methyl-1,3-butanediol molecule or produce 1,3-butadiene by removing two water molecules from one 1,3-butanediol molecule. Furthermore, a method for producing a conjugated diene includes a step of obtaining a fluid containing a conjugated diene that is isoprene or 1,3-butadiene by bringing a fluid containing 3-methyl-1,3-butanediol or a fluid containing 1,3-butanediol into contact with the catalyst for producing a conjugated diene as a single catalyst so as to cause a dehydration reaction to proceed.

Abstract: An arc detection circuit includes a current detector and arc determination unit. The current detector detects a current flowing through a transmission line which connects an electric power supply device and an electric power conversion circuit. The arc determination unit calculates, from a result of measurement of the current, an area of interest and an area for comparison. The area of interest is an area of a region of interest defined by a predetermined frequency range and predetermined time for determination. The area for comparison is an area of a portion in which detected strength exceeds a predetermined strength threshold in the region of interest. The arc determination unit determines an electric arc has occurred when a ratio between the area of interest and the area for comparison exceeds a predetermined area-ratio threshold.

Abstract: Provided is a technique of producing isoprene from 3-methyl-1,3-butanediol or 1,3-butadiene from 1,3-butanediol by using a single catalyst. A catalyst produces a conjugated diene containing zirconium oxide and calcium oxide in order to produce isoprene by removing two water molecules from one 3-methyl-1,3-butanediol molecule or produce 1,3-butadiene by removing two water molecules from one 1,3-butanediol molecule. Furthermore, a method for producing a conjugated diene includes a step of obtaining a fluid containing a conjugated diene that is isoprene or 1,3-butadiene by bringing a fluid containing 3-methyl-1,3-butanediol or a fluid containing 1,3-butanediol into contact with the catalyst for producing a conjugated diene as a single catalyst so as to cause a dehydration reaction to proceed.

Abstract: An arc detection circuit includes a current detector and arc determination unit. The current detector detects a current flowing through a transmission line which connects an electric power supply device and an electric power conversion circuit. The arc determination unit calculates, from a result of measurement of the current, an area of interest and an area for comparison. The area of interest is an area of a region of interest defined by a predetermined frequency range and predetermined time for determination. The area for comparison is an area of a portion in which detected strength exceeds a predetermined strength threshold in the region of interest. The arc determination unit determines an electric arc has occurred when a ratio between the area of interest and the area for comparison exceeds a predetermined area-ratio threshold.

Abstract: An adsorbent of the invention, which is an adsorbent for removing carbonyl sulfide in a stream containing an olefin, contains copper oxide and an aluminum compound, in which a content of the aluminum compound ranges from 10 mass % to 50 mass % in terms of Al, and an NH3 desorption in a temperature region ranging from 100 degrees C. to 200 degrees C. as measured by NH3-TPD measurement is more than 0.001 mmol/g and 1 mmol/g or less.

Abstract: In an arc detector, a frequency analyzer analyzes frequency components of a current subject to detection in a first frequency band. A detector detects an occurrence of an arc by referring to the frequency components in the first frequency band. When the detector does not detect the occurrence of an arc by referring to the frequency components in the first frequency band, the frequency analyzer analyzes frequency components of the current subject to detection in a second frequency band lower than the first frequency band, and the detector detects the occurrence of an arc by referring to the frequency components in the second frequency band.

Abstract: To provide a charged particle beam device which enables observation and evaluation of the surface and the inside of a sample with low damage to the sample, the charged particle beam device has: a charged particle beam source 2; a sample table 9 in which the sample 210 is placed; a charged particle beam optical system which pulsates a charged particle beam 100 and irradiates the charged particle beam to the sample at an acceleration voltage within a range of 0 kV to 5 kV; a split distance selector 125 for selecting a measurement object of the sample; and a split distance setting unit 124 for setting a split distance in one line scanning of the charged particle beam on the sample.

Abstract: Provided is a water-resistant sulfur compound adsorbent having a crushing strength that is less likely to be reduced even when used in a process including moisture. A certain amount of cellulose derivative is contained in the sulfur compound adsorbent containing a copper component for adsorbing a sulfur compound. This imparts water resistance to the adsorbent. As a result, it is possible to obtain the water-resistant sulfur compound adsorbent having the crushing strength that is less likely to be reduced even when used in the process including moisture.

Abstract: Provided is a water-resistant sulfur compound adsorbent having a crushing strength that is less likely to be reduced even when used in a process including moisture. A certain amount of cellulose derivative is contained in the sulfur compound adsorbent containing a copper component for adsorbing a sulfur compound. This imparts water resistance to the adsorbent. As a result, it is possible to obtain the water-resistant sulfur compound adsorbent having the crushing strength that is less likely to be reduced even when used in the process including moisture.

Abstract: In an arc detector, a frequency analyzer analyzes frequency components of a current subject to detection in a first frequency band. A detector detects an occurrence of an arc by referring to the frequency components in the first frequency band. When the detector does not detect the occurrence of an arc by referring to the frequency components in the first frequency band, the frequency analyzer analyzes frequency components of the current subject to detection in a second frequency band lower than the first frequency band, and the detector detects the occurrence of an arc by referring to the frequency components in the second frequency band.

Abstract: To provide a charged particle beam device which enables observation and evaluation of the surface and the inside of a sample with low damage to the sample, the charged particle beam device has: a charged particle beam source 2; a sample table 9 in which the sample 210 is placed; a charged particle beam optical system which pulsates a charged particle beam 100 and irradiates the charged particle beam to the sample at an acceleration voltage within a range of 0 kV to 5 kV; a split distance selector 125 for selecting a measurement object of the sample; and a split distance setting unit 124 for setting a split distance in one line scanning of the charged particle beam on the sample.

Abstract: A lower olefin producing catalyst which has high olefin production efficiency and maintains its activity for a long period of time when lower olefins are produced from an oxygen-containing compound, which is a solid catalyst used in producing lower olefins from an oxygen-containing compound, includes a solid-state catalyst component containing an MFI-type zeolite, in which, at a position where the shortest distance to the outer surface is maximum among all positions inside a structure of the solid catalyst, the thickness defined as a distance twice the shortest distance from the point to the outer surface is in a range of from 0.1 to 2.0 mm, and a method for producing lower olefins.

Abstract: An alkaline-earth metal compound-containing zeolite catalyst composed of a composite material comprising at least a first component, a second component, and a third component. The first component is composed of at least one of zeolites selected from a group consisting of proton-type zeolites and ammonium type zeolites. The second component is composed of at least one of alkaline-earth metal compounds. The third component is composed of at least one selected from a group consisting of aluminum oxides, aluminum hydroxides, silicon oxides, silicon hydroxides, and clay minerals. The first component has a molar ratio of Si/Al of 10 or more and 300 or less. Content of the second component relative to the first component is 0.3 mass % or more and less than 10 mass % as alkaline-earth metal. Content of the third component relative to the first component is 15 mass % or more and 200 mass % or less.

Abstract: Disclosed is a method for production of lower olefins from a raw material containing dimethyl ether (DME), which can produce lower olefins (e.g. propylene) with good yield and in an economically advantageous manner by prolonging the time until the reversible deactivation of a zeolite catalyst and preventing the irreversible deactivation of the catalyst, can reduce the amount of water to be recycled to increase the thermal efficiency of the process, and can simplify the facilities and operations. Also disclosed is a method for improving the yield of propylene with good efficiency under practical operating conditions. A feed gas which comprises a DME-containing feedstock gas and an additive gas and further contains steam at a specific proportion is introduced into an olefin synthesis reactor to contact the feed gas with a zeolite catalyst, thereby producing a hydrocarbon product containing C2-C5 olefins.

Abstract: An alkaline-earth metal compound-containing zeolite catalyst composed of a composite material comprising at least a first component, a second component, and a third component. The first component is composed of at least one of zeolites selected from a group consisting of proton-type zeolites and ammonium type zeolites. The second component is composed of at least one of alkaline-earth metal compounds. The third component is composed of at least one selected from a group consisting of aluminum oxides, aluminum hydroxides, silicon oxides, silicon hydroxides, and clay minerals. The first component has a molar ratio of Si/Al of 10 or more and 300 or less. Content of the second component relative to the first component is 0.3 mass % or more and less than 10 mass % as alkaline-earth metal. Content of the third component relative to the first component is 15 mass % or more and 200 mass % or less.