Abstract: The object of the present invention is to provide a production process of a microfluidic device in which a porous resin layer, which is capable of optimally fixing a large amount of enzyme, antigen or other protein or catalyst on the inner surface of a minute channel of a microfluidic device without obstructing said channel, is formed at a uniform thickness on the surface of said channel. In the present invention, by preliminarily forming a porous resin layer having a large number of pores in its surface on a substrate, and forming an indentation having a porous resin layer on its bottom surface by using an activating energy beam-curable composition on said porous resin layer, followed by forming a channel by adhering a member serving as a cover to said indentation, a porous resin layer can easily be formed at a uniform thickness on the surface of said channel.

Abstract: There is provided a micro chemical device with a valve function for which the pressure resistance is high and the channel cross-sectional area does not depend on the fluid pressure, and which furthermore enables the suppression of the adsorption of biological matter and yet is easy to produce, as well as a flow regulation method using such a device. This has a valve function, in which a member (B) is bonded to a member (A) with a groove in the surface thereof, via the surface of the member (A) in which the groove is formed, a capillary type channel of width from 1 to 1000 ?m and height from 1 to 1000 ?m is formed by the groove of the member (A) and the member (B) at the bonding surface between the member (A) and the member (B), a cavity section is formed partway along the channel and the width of this cavity section is from 0.

Abstract: The present invention provides a method of manufacturing a microdevice having a fine capillary cavity formed as a cut portion of a very thin layer which is likely to be broken, particularly a method of manufacturing a microdevice having complicated passages formed in three dimensions with high productivity. Also, the present invention provides a multi-functional microdevice which has a fine capillary passage formed by laminating plural resin layers, fine capillary cavities piercing through the respective layers to communicate and intersect three-dimensionally with each other, a space which should serve as a reaction chamber, a diaphragm valve, and a stopper structure.

Abstract: There is provided a micro chemical device with a valve function for which the pressure resistance is high and the channel cross-sectional area does not depend on the fluid pressure, and which furthermore enables the suppression of the adsorption of biological matter and yet is easy to produce, as well as a flow regulation method using such a device. This has a valve function, in which a member (B) is bonded to a member (A) with a groove in the surface thereof, via the surface of the member (A) in which the groove is formed, a capillary type channel of width from 1 to 1000 &mgr;m and height from 1 to 1000 &mgr;m is formed by the groove of the member (A) and the member (B) at the bonding surface between the member (A) and the member (B), a cavity section is formed partway along the channel and the width of this cavity section is from 0.

Abstract: The present invention provides a method of manufacturing a microdevice having a fine capillary cavity formed as a cut portion of a very thin layer which is likely to be broken, particularly a method of manufacturing a microdevice having complicated passages formed in three dimensions with high productivity. Also, the present invention provides a multi-functional microdevice which has a fine capillary passage formed by laminating plural resin layers, fine capillary cavities piercing through the respective layers to communicate and intersect three-dimensionally with each other, a space which should serve as a reaction chamber, a diaphragm valve, and a stopper structure.