Patents by Inventor Atsushi Tokuno

Atsushi Tokuno has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Exposure apparatus
    Patent number: 9799489
    Abstract: The invention provides an exposure apparatus (100) including a formation module (122) which forms charged particle beams with different irradiation positions on a specimen.
    Type: Grant
    Filed: January 10, 2017
    Date of Patent: October 24, 2017
    Assignee: Advantest Corp.
    Inventors: Shinichi Hamaguchi, Hitoshi Tanaka, Atsushi Tokuno, Shinichi Kojima, Akio Yamada
  • EXPOSURE APPARATUS
    Publication number: 20170229285
    Abstract: The invention provides an exposure apparatus (100) including a formation module (122) which forms charged particle beams with different irradiation positions on a specimen.
    Type: Application
    Filed: January 10, 2017
    Publication date: August 10, 2017
    Inventors: Shinichi Hamaguchi, Hitoshi Tanaka, Atsushi Tokuno, Shinichi Kojima, Akio Yamada