Patents by Inventor Atsushi Tomura

Atsushi Tomura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240112918
    Abstract: A plasma processing system includes: first and second processing chambers having respective first and second substrate supports; a transport chamber connected to the first and second processing chambers, and having a transport device; and a controller that executes processing of (a) disposing a substrate including a silicon-containing film having a recess portion and a mask on the silicon-containing film on the first substrate support of the first processing chamber, (b) forming a carbon-containing film on a side wall of the silicon-containing film defining the recess portion in the first processing chamber, (c) transporting the substrate from the first processing chamber to the second processing chamber via the transport chamber and disposing the substrate on the second substrate support, and (d) etching a bottom portion of the recess portion where the carbon-containing film is formed by using a plasma formed from a first processing gas in the second processing chamber.
    Type: Application
    Filed: October 3, 2023
    Publication date: April 4, 2024
    Inventors: Noboru SAITO, Yuta NAKANE, Atsushi TAKAHASHI, Shinya ISHIKAWA, Satoshi OHUCHIDA, Maju TOMURA
  • Patent number: D287954
    Type: Grant
    Filed: September 17, 1984
    Date of Patent: January 27, 1987
    Assignee: Bridgestone Corporation
    Inventors: Atsushi Tomura, Hideaki Nishio
  • Patent number: D287955
    Type: Grant
    Filed: December 3, 1984
    Date of Patent: January 27, 1987
    Assignee: Bridgestone Corporation
    Inventors: Toshio Hayakawa, Atsushi Tomura
  • Patent number: D287957
    Type: Grant
    Filed: December 3, 1984
    Date of Patent: January 27, 1987
    Assignee: Bridgestone Corporation
    Inventors: Toshio Hayakawa, Atsushi Tomura, Hideaki Nishio
  • Patent number: D292972
    Type: Grant
    Filed: June 6, 1985
    Date of Patent: December 1, 1987
    Inventors: Hideaki Nishio, Atsushi Tomura
  • Patent number: D301327
    Type: Grant
    Filed: November 19, 1986
    Date of Patent: May 30, 1989
    Assignee: Bridgestone Corporation
    Inventors: Toshiaki Kobayashi, Atsushi Tomura
  • Patent number: D301446
    Type: Grant
    Filed: November 19, 1986
    Date of Patent: June 6, 1989
    Assignee: Bridgestone Corporation
    Inventors: Toshiaki Kobayashi, Atsushi Tomura
  • Patent number: D313959
    Type: Grant
    Filed: April 22, 1988
    Date of Patent: January 22, 1991
    Assignee: Bridgestone Corporation
    Inventors: Toshiaki Kobayashi, Atsushi Tomura
  • Patent number: D345536
    Type: Grant
    Filed: December 29, 1992
    Date of Patent: March 29, 1994
    Assignee: Bridgestone Corporation
    Inventor: Atsushi Tomura
  • Patent number: D345953
    Type: Grant
    Filed: December 29, 1992
    Date of Patent: April 12, 1994
    Assignee: Bridgestone Corporation
    Inventor: Atsushi Tomura
  • Patent number: D371098
    Type: Grant
    Filed: January 18, 1995
    Date of Patent: June 25, 1996
    Assignee: Bridgestone Corporation
    Inventor: Atsushi Tomura
  • Patent number: D371101
    Type: Grant
    Filed: January 18, 1995
    Date of Patent: June 25, 1996
    Assignee: Bridgestone Corporation
    Inventor: Atsushi Tomura