Abstract: An exposure apparatus includes a droplet supplier to supply a target droplet inside a vacuum chamber, an irradiator irradiating a pulsed laser onto the target droplet, a condensing mirror installed inside the vacuum chamber and configured to condense a light emitted from the target droplet by irradiation of the pulsed laser onto the target droplet, a gas supplier to flow a hydrogen gas along a surface of the condensing mirror, a controller to change a supply condition of the target droplet and an irradiation condition of the pulsed laser to conditions different from conditions during an exposure operation to increase an amount of production of hydrogen radicals in the vacuum chamber, and an exhaust pump to exhaust a gas from an inside of the vacuum chamber.

Abstract: The stop position of a workpiece is detected by a position detection unit. A control unit calculates and records a difference between the detected stop position (actual stop position) and a reference stop position set in advance. After recording the difference multiple times, the control unit performs a statistical processing of the differences and calculates a compensation amount based on results of the statistical processing. In the next position detecting, the position detection unit is disposed at a compensated position which is obtained by adding the compensation amount to the reference stop position, and in this state, detects the position of a predetermined portion of the workpiece.

Abstract: An objective is to provide a holding device capable of holding a hexagonal part at a nearly fixed orientation. A holding device 1 holds a bolt B by a left claw member 32L and a right claw member 32R. A left recessed portion 34L and a right recessed portion 34R in a recessed manner toward the bolt B in plan view are respectively formed in inner side end portions 33L and 33R facing the bolt B, of the claw members 32L and 32R, a pair of protruding portions 36L and 37L and a pair of protruding portions 36R and 37R protruding toward the bolt B are respectively formed in the portions 34L and 34R, the distances ra and rb from a center O to the portions 36L and 37L are equal in each of the claw members 32L and 32R, and the protrusion interval ? is from d/?3 to d.

Abstract: The stop position of a workpiece is detected by a position detection unit. A control unit calculates and records a difference between the detected stop position (actual stop position) and a reference stop position set in advance. After recording the difference multiple times, the control unit performs a statistical processing of the differences and calculates a compensation amount based on results of the statistical processing. In the next position detecting, the position detection unit is disposed at a compensated position which is obtained by adding the compensation amount to the reference stop position, and in this state, detects the position of a predetermined portion of the workpiece.

Abstract: Bearing 10 includes: a half bearing member having an inner circumferential face that slides against an associated shaft, and a plurality of recesses provided in a first end face in an axial direction of the associated shaft; a first flange member having a plurality of projections provided at positions corresponding to the plurality of recesses provided in the first end face; and a plurality of staking marks formed in a periphery of each recess when each recess is staked in a state where each of the plurality of projections is fitted to a corresponding one of the plurality of recesses in the first end face to fix the first flange member to the half bearing member. When staking marks formed on both sides of at least one of the plurality of recesses are viewed in a radial direction of the associated shaft, a volume of a deformed portion near a staking mark located outside in a circumferential direction is smaller than a volume of a deformed portion close to a staking mark located inside.

Abstract: Bearing 10 includes: a half bearing member having an inner circumferential face that slides against an associated shaft, and a plurality of recesses provided in a first end face in an axial direction of the associated shaft; a flange member having a plurality of projections provided at positions corresponding to the plurality of recesses provided in the first end face; and a plurality of staking marks formed in a periphery of each recess when each recess is staked in a state where each of the plurality of projections is fitted to a corresponding one of the plurality of recesses in the first end face to fix the flange member to the half bearing member, wherein a free spread of the half bearing member before the staking is at least 0.2 mm wider than a spread of the half bearing after the staking.

Abstract: Bearing 10 includes: a half bearing member having an inner circumferential face that slides against an associated shaft, and a plurality of recesses provided in a first end face in an axial direction of the associated shaft; a first flange member having a plurality of projections provided at positions corresponding to the plurality of recesses provided in the first end face; and a plurality of staking marks formed in a periphery of each recess when each recess is staked in a state where each of the plurality of projections is fitted to a corresponding one of the plurality of recesses in the first end face to fix the first flange member to the half bearing member. When staking marks formed on both sides of at least one of the plurality of recesses are viewed in a radial direction of the associated shaft, a volume of a deformed portion near a staking mark located outside in a circumferential direction is smaller than a volume of a deformed portion close to a staking mark located inside.

Abstract: Bearing 10 includes: a half bearing member having an inner circumferential face that slides against an associated shaft, and a plurality of recesses provided in a first end face in an axial direction of the associated shaft; a flange member having a plurality of projections provided at positions corresponding to the plurality of recesses provided in the first end face; and a plurality of staking marks formed in a periphery of each recess when each recess is staked in a state where each of the plurality of projections is fitted to a corresponding one of the plurality of recesses in the first end face to fix the flange member to the half bearing member, wherein a free spread of the half bearing member before the staking is at least 0.2 mm wider than a spread of the half bearing after the staking.

Abstract: A manufacturing facility includes a plurality of programmable logic controllers that contain operating programs and process parameters. The programmable logic controllers are connected to a network such that the operating programs and process parameters from the programmable logic controllers can be backed-up to a remote data storage device. Preferably, the backing-up of the programmable logic controllers takes place automatically and periodically in a manner that does not interrupt the manufacturing process.

Abstract: A manufacturing facility includes a plurality of programmable logic controllers that contain operating programs and process parameters. The programmable logic controllers are connected to a network such that the operating programs and process parameters from the programmable logic controllers can be backed-up to a remote data storage device. Preferably, the backing-up of the programmable logic controllers takes place automatically and periodically in a manner that does not interrupt the manufacturing process.

Abstract: An apparatus for inspecting an electric component in an inverter circuit has a DC power supply for supplying a direct current to a given position in an inverter circuit, a voltage detector for detecting a voltage at a given position in the inverter circuit, a current detector for detecting a current flowing at a given position in the inverter circuit, a switching circuit for changing positions at which the direct current is supplied from the DC power supply, positions at which the voltage is detected by the voltage detector, and positions at which the current is detected by the current detector, and a controller for outputting a switching signal to the switching circuit. The switching circuit is controlled by the controller to charge an electrolytic capacitor in an inverter circuit with a current from the DC power supply. The electrolytic capacitor is determined as to its quality by determining whether the calculated electrolytic capacitance of the electrolytic capacitor falls within a preset range or not.

Abstract: A method and apparatus for inspecting a transistor in an inverter circuit includes turning on only the transistor of the inverter circuit. A predetermined collector current is supplied to the transistor until a transistor junction temperature reaches a predetermined temperature. The transistor is acceptable if a difference between a transistor collector-to-emitter voltage when the predetermined collector current is supplied and a transistor collector-to-emitter voltage when the junction temperature reaches the predetermined temperature falls within a preset range. Switching elements of the inverter circuit are controlled to supply a current through a resistor to charge an electrolytic capacitor of the inverter circuit. A voltage across the electrolytic capacitor during charging and a time period is measured from the beginning of charging until a time when a voltage across the electrolytic capacitor attains a predetermined voltage.

Abstract: An apparatus for inspecting an electric component in an inverter circuit has a DC power supply for supplying a direct current to a given position in an inverter circuit, a voltage detector for detecting a voltage at a given position in the inverter circuit, a current detector for detecting a current flowing at a given position in the inverter circuit, a switching circuit for changing positions at which the direct current is supplied from the DC power supply, positions at which the voltage is detected by the voltage detector, and positions at which the current is detected by the current detector, and a controller for outputting a switching signal to the switching circuit. The switching circuit is controlled by the controller to charge an electrolytic capacitor in an inverter circuit with a current from the DC power supply. The electrolytic capacitor is determined as to its quality by determining whether the calculated electrolytic capacitance of the electrolytic capacitor falls within a preset range or not.