Abstract: A method of forming a film on a base member disposed in a reactor comprises introducing an organic gas into the reactor for use as a starting material for the film, and a dilute gas including an inert gas, irradiating a surface of the base member with vacuum ultraviolet rays; and forming the film on the base member under a normal pressure atmosphere.

Abstract: Ultrapure water having a reduced amount of TOC and a low electrical conductivity is produced in correspondence with a variation in water quality of raw water. A first water tank has an anaerobic organic matter treatment chamber and an aerobic organic matter treatment chamber which are communicated with each other at their bottom portions. Activated carbon bags are arranged in upper portions of both the chambers, and Bincho charcoal is stowed in the lower portion of the chambers. With this arrangement, carbon compounds and organic nitrogen compounds in the water to be treated are biologically treated by microbes, thereby reducing the TOC. Furthermore, nitrate nitrogen generated through the organic nitrogen compound treatment process is denitrified by the anaerobic microbe, thereby reducing the electrical conductivity of the water to be treated.

Abstract: In a third tank, calcium carbonate mineral is filled to react with fluorine in treatment water. Then, generated treatment water containing calcium fluoride is aerated and stirred so that aerobic microorganisms are propagated, by which organic matters are treated. A fourth water tank is to perform treatment of hydrogen peroxide by anaerobic microorganisms in return sludge from a sixth tank, treatment of phosphorus by slaked lime newly added in a small amount, and secondary treatment (advanced treatment) of fluorine that has already been primarily treated in the third tank. In a fifth tank, flocs are coagulated. In the sixth tank, the coagulants are settled and separated so as to be discharged as treated water. Thus, mixed waste water of hydrogen-peroxide- and phosphorus-containing fluorine waste water and organic-matter-containing waste water is treated simultaneously with low running cost and maintenance cost.

Abstract: A method and apparatus for wastewater treatment is provided which can treat persistent surface active agents and coloring substances in wastewater, and which is compact and economical. The wastewater treatment method introduces water to be treated into a charcoal tank 3 packed with charcoal 10 and treats the water therein, the water to be treated having been pretreated in a pretreatment section 2. The water under treatment is introduced from the charcoal tank 3 into an activated carbon tower 6 packed with activated carbon 17 to treat the water therein. Treatment of the water in two stages, namely, treatment by bioactivated charcoal 10 and treatment by bioactivated carbon 17, makes it unnecessary to carry out backwashing of the activated carbon tower 6 and regeneration of activated carbon 17. The service life of the activated carbon can be greatly extended.

Abstract: An apparatus for wastewater treatment is provided which can efficiently treat wastewater containing organic matter and, in addition, fluorine, with a relatively small number of tanks required for such treatment. The apparatus includes a first tank adapted to allow wastewater to flow thereinto, the first tank comprising an upper portion having a calcium carbonate mineral mass of smaller granule size and an aeration tube for fluidizing such calcium carbonate mineral mass while aerating the same in the wastewater, an intermediate portion and a lower portion which respectively include a calcium carbonate mineral mass of medium granule size and a calcium carbonate mineral mass of larger granule size, the medium and larger granule size masses of calcium carbonate mineral constituting immobilizing carriers for microbial propagation, and a circulation pump for transferring treated water resulting from treatment in the upper portion to the lower portion.

Abstract: A method and apparatus for wastewater treatment is provided which can prevent any decrease in permeation efficiency of a submerged membrane without involving an increase in operating cost and sludge generation, and which can treat high concentration organic wastewater efficiently and without dilution. The wastewater treatment method has the steps of: concentrating domestic sludge by means of a first submerged membrane to produce thick sludge; mixing the thick sludge into a water to be treated, and introducing the water to be treated which is so mixed with the thick sludge into an anaerobic treatment portion for anaerobically treating the same; and introducing the anaerobically treated water from the anaerobic treatment portion into an aerobic treatment portion having a second submerged membrane disposed therein to subject the water to aerobic treatment.

Abstract: The waste water treatment apparatus includes a first water tank which has an upper part and a lower part. The upper part has an air diffuser, and calcium carbonate mineral is packed in the upper part. The calcium carbonate mineral in the upper part is strongly fluidized by aeration by the air diffuser to treat waste water in the upper part through its chemical reaction with the waste water. The calcium carbonate mineral settles in the lower part and serves as an immobilizing carrier for microorganisms to execute microbial treatment of the water.

Abstract: There is provided an ultrapure water production system which allows recycled waste water to be microbially treated and thereby reclaimed without causing any clogging of treatment system due to abnormal propagation of microorganisms, and which allows ultrapure water with 1 ppb or lower TOC to be obtained. This ultrapure water production system includes a lower part having an anaerobic organism treatment part (12), and an upper part which is placed above the lower part via a separating wall W.sub.B having an opening (16) and which has a biological treatment equipment including an aerobic organism treatment part (1). Since lower anaerobic microorganisms and upper aerobic microorganisms consume nutrition sources for microorganisms, treated water which is difficult for microorganisms to propagate can be obtained. Further, not only TOC but also organic nitrogen compounds are treated by the microorganisms, by which treated water with low electrical conductivity can be obtained.

Abstract: A wastewater treating apparatus has first, second and third bioreactors. Each bioreactor has, in an upper position, a reaction/sprinkling portion for exhaust gas treatment. The first bioreactor has, in a lower position, a submerged portion including an aerobic upper portion and an anaerobic lower portion. The aerobic upper portion includes a membrane filter. A membrane concentrated liquid produced by the membrane filter is introduced into a mixing tank. A mixture of an alcohol, fine powdered material and membrane concentrated liquid from the mixing tank is introduced, together with a developer-containing wastewater, into the anaerobic lower portion, so that a granular sludge is formed therein. The granular sludge contains anaerobic microorganisms in a high concentration level and is therefore capable of treating the wastewater without necessity of wastewater dilution or use of chemicals.

Abstract: There is provided a hydrogen peroxide removal equipment which has a high capability for removing hydrogen peroxide and is able to cope with variation in amount of a hydrogen peroxide containing waste water and variation of a hydrogen peroxide concentration occurring in a semiconductor plant. A tank 51 is internally provided with a first decomposition section 16, a second decomposition section 17 and a third decomposition section 8 which are constituted by combining a charcoal 9 and a plastic material 10 having a void capable of allowing water and gas to pass therethrough. The first and second decomposition sections 16 and 17 are provided below the level of an outlet port 42 and arranged on both sides of a vertical partition plate 13 located apart from a bottom plate 51E. The third decomposition section 8 is provided above the level of the outlet port 42 and arranged above the first and second decomposition sections 16 and 17.