Patents by Inventor Atsushi Yumoto

Atsushi Yumoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220349766
    Abstract: A resonant pressure sensor includes: a housing; a housing-fixed portion that is fixed to the housing; a substrate that comprises: a substrate-fixed portion that is fixed to the housing-fixed portion; and a substrate-separated portion that is separated from the housing-fixed portion in a first direction and extends from the substrate-fixed portion; a first resonator that is disposed in the substrate-separated portion and that detects a change of a resonance frequency based on a strain in the substrate caused by static pressure applied by a pressure-receiving fluid; a first electrode that extends along a second direction perpendicular to the first direction and that outputs an excitation signal to the first resonator to excite the first resonator; and a second electrode that extends along the second direction and from which the first resonator outputs a signal having the resonance frequency.
    Type: Application
    Filed: June 30, 2022
    Publication date: November 3, 2022
    Applicant: YOKOGAWA ELECTRIC CORPORATION
    Inventors: Shigeto Iwai, Atsushi Yumoto, Makoto Noro, Takashi Yoshida
  • Patent number: 11428594
    Abstract: A resonant pressure sensor has high linearity and includes: a housing; and a pressure sensing unit that detects a static pressure based on a change value of a resonance frequency and includes: a housing-fixed portion; a substrate that includes a substrate-fixed portion and a substrate-separated portion; the pressure-receiving fluid that is interposed in a gap between the housing-fixed portion and the substrate and envelops the substrate; and a first resonator that is disposed in the substrate-separated portion and detects the change value of the resonance frequency based on a strain in the substrate caused by the static pressure applied by the pressure-receiving fluid, wherein the first resonator is made of a semiconductor material including an impurity, a concentration of the impurity is 1×1020 (cm?3) or higher, and an atomic radius of the impurity is smaller than an atomic radius of the semiconductor material.
    Type: Grant
    Filed: January 7, 2021
    Date of Patent: August 30, 2022
    Assignee: YOKOGAWA ELECTRIC CORPORATION
    Inventors: Shigeto Iwai, Atsushi Yumoto, Makoto Noro, Takashi Yoshida
  • Publication number: 20220120627
    Abstract: A resonant pressure sensor includes a first substrate and a resonator. The first substrate includes a diaphragm and a projection disposed on the diaphragm. The resonator is disposed in the first substrate, a part of the resonator being included in the projection, and the resonator being disposed between a top of the projection and an intermediate level of the first substrate. The first substrate is an SOI substrate in which a silicon dioxide layer is inserted between a silicon substrate and a superficial silicon layer. The intermediate level of the first substrate is disposed in the silicon substrate, and the resonator is disposed in the projection included in the superficial silicon layer.
    Type: Application
    Filed: December 30, 2021
    Publication date: April 21, 2022
    Applicant: Yokogawa Electric Corporation
    Inventors: Takashi YOSHIDA, Yuusaku YOSHIDA, Atsushi YUMOTO, Yoshitaka SUZUKI
  • Patent number: 11243131
    Abstract: A resonant pressure sensor includes a first substrate including a diaphragm and at least one projection disposed on the diaphragm, and at least one resonator disposed in the first substrate, at least a part of the resonator being included in the projection, and the resonator being disposed between a top of the projection and an intermediate level of the first substrate.
    Type: Grant
    Filed: August 15, 2014
    Date of Patent: February 8, 2022
    Assignee: Yokogawa Electric Corporation
    Inventors: Takashi Yoshida, Yuusaku Yoshida, Atsushi Yumoto, Yoshitaka Suzuki
  • Patent number: 11211916
    Abstract: A resonant transducer includes a resonant beam which is formed on a semiconductor substrate, a support beam of which one end is connected to a part of the resonant beam at a predetermined angle, a first electrode which is connected to the resonant beam via the support beam, a second electrode which is disposed adjacent to a center of one side surface of the resonant beam, and a conductor which is disposed between the support beam and the second electrode, the conductor being connected to the first electrode.
    Type: Grant
    Filed: November 16, 2017
    Date of Patent: December 28, 2021
    Assignee: Yokogawa Electric Corporation
    Inventors: Takashi Yoshida, Yusaku Yoshida, Makoto Noro, Atsushi Yumoto, Shuhei Yoshita
  • Publication number: 20210284535
    Abstract: An aluminum nitride film includes a polycrystalline aluminum nitride. A withstand voltage of the aluminum nitride film is 100 kV/mm or more.
    Type: Application
    Filed: June 1, 2021
    Publication date: September 16, 2021
    Applicants: SHIBAURA INSTITUTE OF TECHNOLOGY, TOSHIBA MATERIALS CO., LTD.
    Inventors: Atsushi YUMOTO, Mari SHIMIZU, Tetsuo INOUE, Takashi HINO, Shuichi SAITO
  • Publication number: 20210229166
    Abstract: What is provided is a secondary cooling device for continuous casting that is configured to cool a slab, which is sent in a casting direction, by spraying cooling water to the slab surface. The secondary cooling device for continuous casting includes a plurality of rolls disposed side by side in the vertical direction along a casting direction and a spray nozzle configured to spray the cooling water to the slab surface from between the plurality of rolls.
    Type: Application
    Filed: June 25, 2018
    Publication date: July 29, 2021
    Applicant: NIPPON STEEL CORPORATION
    Inventors: Atsushi YUMOTO, Takanori KIYOSUE, Shoich SHIMOSE, Ryuta MATSUNAGA
  • Patent number: 11067462
    Abstract: A sensor includes: a pressure vessel filled with an enclosed liquid; a diaphragm that seals the pressure vessel; a sensor body contained in the pressure vessel; an electric wire comprising a wiring electrically connected to the sensor body; a fixture that fixes the electric wire to the pressure vessel; a first fillet at a joining portion between the electric wire and the fixture, wherein the first fillet contacts the enclosed liquid; and a second fillet at a joining portion between the fixture and the pressure vessel, wherein the second fillet contacts the enclosed liquid.
    Type: Grant
    Filed: July 23, 2018
    Date of Patent: July 20, 2021
    Assignee: YOKOGAWA ELECTRIC CORPORATION
    Inventors: Toru Hirayama, Yusaku Yoshida, Atsushi Yumoto, Tatsuhiko Miyauchi
  • Publication number: 20210215560
    Abstract: An resonant pressure sensor, includes: a housing; a housing-fixed portion that is fixed to the housing; a substrate that includes a substrate-fixed portion that is fixed to the housing-fixed portion and a substrate-separated portion that is separated from the housing-fixed portion and extends from the substrate-fixed portion; a first resonator that is disposed in the substrate-separated portion and that detects a change of a resonance frequency based on a strain in the substrate caused by static pressure applied by the pressure-receiving fluid; and a processor. A pressure-receiving fluid is interposed in a gap between the housing-fixed portion and the substrate and envelops the substrate. The processor measures the static pressure based on the detected change of the resonance frequency.
    Type: Application
    Filed: January 7, 2021
    Publication date: July 15, 2021
    Applicant: YOKOGAWA ELECTRIC CORPORATION
    Inventors: Shigeto Iwai, Atsushi Yumoto, Makoto Noro, Takashi Yoshida
  • Publication number: 20200208253
    Abstract: A component comprises a film containing yttrium oxide. A cross section of the film has a first portion, a second portion, and a third portion, and the first to third portions are separated from each other by 0.5 mm or more. A Vickers hardness B1 measured in the first portion, a Vickers hardness B2 measured in the second portion, a Vickers hardness B3 measured in the third portion, and an average value A of the Vickers hardnesses B1 to B3 are numbers satisfying 0.8A?B1?1.2A, 0.8A?B2?1.2A, and 0.8A?B3?1.2A.
    Type: Application
    Filed: February 28, 2020
    Publication date: July 2, 2020
    Applicants: SHIBAURA INSTITUTE OF TECHNOLOGY, TOSHIBA MATERIALS CO., LTD.
    Inventors: Atsushi YUMOTO, Tomohiro SUGANO, Takashi HINO, Tetsuo INOUE, Shuichi SAITO
  • Patent number: 10264957
    Abstract: The present invention relates to a cleaner for an endoscope, the cleaner being used inside a living body during an endoscopic, surgical procedure. In particular, an object of the present invention is to reduce the burden on a physician and the patient during an endoscopic surgical procedure. The present invention therefore relates to a cleaner for cleaning debris from an endoscope and/or endoscopic accessories, such as an endoscope lens and/or an endoscope hood (attachment), inside a living body. The present invention also relates to an antifoulant for antifouling treatment of an endoscope and/or endoscopic accessories. The antifoulant may comprise, for example, (i) a nonionic surfactant with an HLB of 1 to 11 and (ii) a nonionic surfactant with an HLB of 11 to 20.
    Type: Grant
    Filed: September 29, 2014
    Date of Patent: April 23, 2019
    Assignees: NAGASE MEDICALS CO., LTD., KYOTO PREFECTURAL PUBLIC UNIVERSITY CORPORATION
    Inventors: Naohisa Yoshida, Sae Ishii, Atsushi Yumoto, Hisami Yumoto
  • Publication number: 20190064023
    Abstract: A sensor includes: a pressure vessel filled with an enclosed liquid; a diaphragm that seals the pressure vessel; a sensor body contained in the pressure vessel; an electric wire comprising a wiring electrically connected to the sensor body; a fixture that fixes the electric wire to the pressure vessel; a first fillet at a joining portion between the electric wire and the fixture, wherein the first fillet contacts the enclosed liquid; and a second fillet at a joining portion between the fixture and the pressure vessel, wherein the second fillet contacts the enclosed liquid.
    Type: Application
    Filed: July 23, 2018
    Publication date: February 28, 2019
    Applicant: YOKOGAWA ELECTRIC CORPORATION
    Inventors: Toru Hirayama, Yusaku Yoshida, Atsushi Yumoto, Tatsuhiko Miyauchi
  • Publication number: 20190002281
    Abstract: An aluminum nitride film includes a polycrystalline aluminum nitride. A withstand voltage of the aluminum nitride film is 100 kV/mm or more.
    Type: Application
    Filed: September 7, 2018
    Publication date: January 3, 2019
    Applicants: SHIBAURA INSTITUTE OF TECHNOLOGY, TOSHIBA MATERIALS CO., LTD.
    Inventors: Atsushi YUMOTO, Mari SHIMIZU, Tetsuo INOUE, Takashi HINO, Shuichi SAITO
  • Publication number: 20180145656
    Abstract: A resonant transducer includes a resonant beam which is formed on a semiconductor substrate, a support beam of which one end is connected to a part of the resonant beam at a predetermined angle, a first electrode which is connected to the resonant beam via the support beam, a second electrode which is disposed adjacent to a center of one side surface of the resonant beam, and a conductor which is disposed between the support beam and the second electrode, the conductor being connected to the first electrode.
    Type: Application
    Filed: November 16, 2017
    Publication date: May 24, 2018
    Applicant: Yokogawa Electric Corporation
    Inventors: Takashi YOSHIDA, Yusaku YOSHIDA, Makoto NORO, Atsushi YUMOTO, Shuhei YOSHITA
  • Patent number: 9952250
    Abstract: A resonant sensor includes a mover that is movable in a first direction, a supporter that extends in a second direction perpendicular to the first direction, the supporter being connected to the mover and a fixer, the supporter supporting the mover which is movable in the first direction, and a resonator that is vibratable, at least a part of the resonator being embedded in the supporter.
    Type: Grant
    Filed: August 19, 2015
    Date of Patent: April 24, 2018
    Assignee: Yokogawa Electric Corporation
    Inventors: Yusaku Yoshida, Takashi Yoshida, Atsushi Yumoto
  • Patent number: 9447494
    Abstract: A physical vapor deposition apparatus and a physical vapor deposition method for forming a film of a substance which is hard to be made fine particles even when it is heated by plasma, arc discharge, or the like are provided. It has an evaporation chamber 10 provided inside it with an evaporation source material 15 and a heating part 16 for heating the evaporation source material 15, a powder supply source 20 provided inside it with a powder, and a film forming chamber 30, wherein the evaporation source material 15 is heated by the heating part 16 to produce fine particles (nanoparticles), the fine particles and powder are sprayed out of a supersonic nozzle 35, are placed on a supersonic gas stream, and are deposited on a substrate for film formation 33 by physical vapor deposition.
    Type: Grant
    Filed: October 13, 2014
    Date of Patent: September 20, 2016
    Assignee: TANAKA KIKINZOKU KOGYO K.K.
    Inventors: Atsushi Yumoto, Naotake Niwa, Fujio Hiroki, Takashisa Yamamoto
  • Publication number: 20160235284
    Abstract: The present invention relates to a cleaner for an endoscope, the cleaner being used inside a living body during an endoscopic, surgical procedure. In particular, an object of the present invention is to reduce the burden on a physician and the patient during an endoscopic surgical procedure. The present invention therefore relates to a cleaner for cleaning debris from an endoscope and/or endoscopic accessories, such as an endoscope lens and/or an endoscope hood (attachment), inside a living body. The present invention also relates to an antifoulant for antifouling treatment of an endoscope and/or endoscopic accessories. The antifoulant may comprise, for example, (i) a nonionic surfactant with an HLB of 1 to 11 and (ii) a nonionic surfactant with an HLB of 11 to 20.
    Type: Application
    Filed: September 29, 2014
    Publication date: August 18, 2016
    Applicants: NAGASE MEDICALS CO., LTD., KYOTO PREFECTURAL PUBLIC UNIVERSITY CORPORATION
    Inventors: Naohisa YOSHIDA, Sae ISHII, Atsushi YUMOTO, Hisami YUMOTO
  • Publication number: 20160061857
    Abstract: A resonant sensor includes a mover that is movable in a first direction, a supporter that extends in a second direction perpendicular to the first direction, the supporter being connected to the mover and a fixer, the supporter supporting the mover which is movable in the first direction, and a resonator that is vibratable, at least a part of the resonator being embedded in the supporter.
    Type: Application
    Filed: August 19, 2015
    Publication date: March 3, 2016
    Applicant: YOKOGAWA ELECTRIC CORPORATION
    Inventors: Yusaku YOSHIDA, Takashi YOSHIDA, Atsushi YUMOTO
  • Publication number: 20150292076
    Abstract: In a cladding composite material obtained by coating the surface of a base material with an Ag-containing layer, it is difficult to make the size of fine Ag-containing particles which form the structure of the Ag-containing layer uniform in the thickness direction. A vaporization source (15) which contains Ag is irradiated by a high-energy laser beam 17 having a spot diameter for causing vaporization as fine particles which contain Ag from the vaporization source (15) which contains Ag, the fine particles which contain Ag are vaporized, and the fine particles which contain Ag which were obtained by vaporization are ejected as jet to a base material 33 under a high vacuum atmosphere to make than physically deposit on the base material 33 thereby Ag-containing layer is formed on the base material 33.
    Type: Application
    Filed: November 19, 2013
    Publication date: October 15, 2015
    Applicant: TANAKA KIKINZOKU KOGYO K.K.
    Inventors: Takao Asada, Junichi Takeuchi, Ryuta Ido, Atsushi Yumoto
  • Publication number: 20150047434
    Abstract: A resonant pressure sensor includes a first substrate including a diaphragm and at least one projection disposed on the diaphragm, and at least one resonator disposed in the first substrate, at least a part of the resonator being included in the projection, and the resonator being disposed between a top of the projection and an intermediate level of the first substrate.
    Type: Application
    Filed: August 15, 2014
    Publication date: February 19, 2015
    Applicant: YOKOGAWA ELECTRIC CORPORATION
    Inventors: Takashi Yoshida, Yuusaku YOSHIDA, Atsushi YUMOTO, Yoshitaka SUZUKI