Abstract: This visual inspection apparatus has a macro-inspection section and a micro-inspection section. In the micro-inspection section, a inspection stage and a microscope are loaded into a loading plate. The inspection stage can be moved in any directions of the X, Y, and Z directions, and can also be rotated in the ? direction. Moreover, a peripheral edge inspection section that acquires an enlarged image of a peripheral edge of wafer W is fixed to the loading plate. The peripheral edge inspection section is arranged so as to image the peripheral edge of wafer W held by the inspection stage.

Abstract: This visual inspection apparatus has a macro-inspection section and a micro-inspection section. In the micro-inspection section, a inspection stage and a microscope are loaded into a loading plate. The inspection stage can be moved in any directions of the X, Y, and Z directions, and can also be rotated in the ? direction. Moreover, a peripheral edge inspection section that acquires an enlarged image of a peripheral edge of wafer W is fixed to the loading plate. The peripheral edge inspection section is arranged so as to image the peripheral edge of wafer W held by the inspection stage.

Abstract: A visual inspection apparatus includes an upper illuminator, a lower illuminator, a side illuminator, and a pair of inclined illuminators, which illuminate the peripheral edge of a wafer, and illuminates the peripheral edge of the wafer brightly. A gap is formed in the upper illuminator and illumination light of an epi-illumination portion is injected through the gap. The illumination light of the epi-illumination portion is refracted and reflected by a first mirror to illuminate the peripheral edge of the wafer. The illumination position is changed by moving second mirrors together as needed. An image of the peripheral edge is acquired in an imaging portion disposed at the same axis as the epi-illumination portion.

Abstract: This visual inspection apparatus has a macro-inspection section and a micro-inspection section. In the micro-inspection section, a inspection stage and a microscope are loaded into a loading plate. The inspection stage can be moved in any directions of the X, Y, and Z directions, and can also be rotated in the ? direction. Moreover, a peripheral edge inspection section that acquires an enlarged image of a peripheral edge of wafer W is fixed to the loading plate. The peripheral edge inspection section is arranged so as to image the peripheral edge of wafer W held by the inspection stage.

Abstract: The present invention is related to a visual inspection apparatus which can perform various adjustments simply and rapidly. The visual inspection apparatus includes a wafer holder for holding a wafer to be movable in the X, Y, and Z directions and rotatable about the Z axis and a peripheral edge imaging section used to observe a peripheral edge of the wafer W, which are disposed close to each other. A computer for controlling the visual inspection apparatus includes an inspection controller for performing a process of making a visual inspection of the peripheral edge of the wafer W pursuant to a recipe and an interrupt processor for stopping the inspection pursuant to the recipe and receiving a change in inspection condition from scroll bars when an inspector selects an interrupt process.

Abstract: A table type display device, in which a high resolution display with an unremarkable connection is realized at the time of large screen display by using a screen with a composition having few bending is described. In a table type display device comprising plural M of projectors 1L, 1R for projecting luminous flux to form an image, plural N of reflection mirrors 2L, 2R for bending optical paths of luminous fluxes projected from respective plural M of projectors 1L, 1R, screen 3 of horizontal installation type for projecting luminous fluxes for which optical path is bent, by the plurality N of reflection mirrors 2L,2R onto the predetermined region, respectively, the screen comprises a transparent base member 7 for reducing flexure of the screen, optical sheet 9 substantially for making luminous fluxes projected respectively from the plural M of projectors 1L,1R uniform, and a diffusing screen for imaging the image.

Abstract: A table type display device capable of selecting the best projector according to user's budget and mode is provided for with easy exchange of the projector. The table type display device comprises four projectors 1LU, 1LL, 1RU, and 1RL for projecting luminous flux to form image, reflection mirrors 2U and 2L for bending an optical path of luminance flux projected from each of these projectors, and a screen 3 of horizontal installation type for projecting luminous flux with its optical path being bent by reflection mirrors 2U and 2L, onto predetermined regions respectively. The screen housing portion 4b of the main body unit 4 accommodates the screen 3, the reflection mirrors 2U and 2L, and the light shading plates 6LU, 6LL, 6RU, and 6RL, and the projector unit housing portion 4a of the main body unit 4 accommodates projectors 1LU, 1LL, 1RU, and 1RL housed by the projector unit 5.

Abstract: A table type display device capable of selecting the best projector according to user's budget and mode is provided for with easy exchange of the projector.

Abstract: A table type display device, in which a high resolution display with an unremarkable connection is realized at the time of large screen display by using a screen with a composition having few bending is described. In a table type display device comprising plural M of projectors 1L, 1R for projecting luminous flux to form an image, plural N of reflection mirrors 2L, 2R for bending optical paths of luminous fluxes projected from respective plural M of projectors 1L, 1R, screen 3 of horizontal installation type for projecting luminous fluxes for which optical path is bent, by the plurality N of reflection mirrors 2L,2R onto the predetermined region, respectively, the screen comprises a transparent base member 7 for reducing flexure of the screen, optical sheet 9 substantially for making luminous fluxes projected respectively from the plural M of projectors 1L,1R uniform, and a diffusing screen for imaging the image.