Patents by Inventor ATTOLIGHT SA

ATTOLIGHT SA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Deconvolution of Time-Gated Cathodoluminescence Images
    Publication number: 20130193342
    Abstract: A method for generating a cathodoluminescence map comprising the steps of: generating an intensity modulated charged particle beam; focusing said charged particle beam on a specimen; gating temporally the cathodoluminescence emitted by said specimen to provide time-gated cathodoluminescence; measuring the time-gated cathodoluminescence for different charged particle beam positions on the specimen to generate a cathodoluminescence map; deconvoluting the cathodoluminescence map to improve the resolution of said cathodoluminescence map. The invention further provides devices for carrying out such methods.
    Type: Application
    Filed: March 12, 2013
    Publication date: August 1, 2013
    Applicant: ATTOLIGHT SA
    Inventor: ATTOLIGHT SA