Patents by Inventor Atul Aupta

Atul Aupta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use
    Patent number: 11733224
    Abstract: The present application is directed to a method of measuring the concentration of radicals in a gas stream which includes the steps of flowing a radical gas stream emitted from at least one radical gas generator to at least one processing chamber, providing at least one sampling reaction module having at least one sampling tube therein, establishing a reference temperature of the sampling tube with at least one thermal control module, diverting a portion of the radical gas steam from the radical gas generator into the sampling tube, reacting at least one reagent with at least one radical gas within a defined volume of the radical gas stream thereby forming at least one chemical species within at least one compound stream, the compound stream flowing within the sampling tube, measuring a change of temperature of the sampling tube due to interaction of the chemical species within the compound stream and the sampling tube with sensor module, and calculating a concentration of the chemical species within the comp
    Type: Grant
    Filed: January 25, 2022
    Date of Patent: August 22, 2023
    Assignee: MKS Instruments, Inc.
    Inventors: Johannes Chiu, Xing Chen, Chiu-Ying Tai, Michael Harris, Atul Aupta
  • Multi-Sensor Gas Sampling Detection System for Radical Gases and Short-Lived Molecules and Method of Use
    Publication number: 20220214321
    Abstract: The present application is directed to a method of measuring the concentration of radicals in a gas stream which includes the steps of flowing a radical gas stream emitted from at least one radical gas generator to at least one processing chamber, providing at least one sampling reaction module having at least one sampling tube therein, establishing a reference temperature of the sampling tube with at least one thermal control module, diverting a portion of the radical gas steam from the radical gas generator into the sampling tube, reacting at least one reagent with at least one radical gas within a defined volume of the radical gas stream thereby forming at least one chemical species within at least one compound stream, the compound stream flowing within the sampling tube, measuring a change of temperature of the sampling tube due to interaction of the chemical species within the compound stream and the sampling tube with sensor module, and calculating a concentration of the chemical species within the comp
    Type: Application
    Filed: January 25, 2022
    Publication date: July 7, 2022
    Applicant: MKS Instruments, Inc.
    Inventors: Johannes Chiu, Xing Chen, Chiu-Ying Tai, Michael Harris, Atul Aupta