Patents by Inventor Atushi Hidaka

Atushi Hidaka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Raw material vaporizing and supplying apparatus equipped with raw material concentration
    Patent number: 9631777
    Abstract: An apparatus able to regulate a raw material concentration, in a mixed gas of carrier gas and raw material gas, accurately and stably to supply the mixed gas to a process chamber, with a flow rate controlled highly accurately, thereby detecting a vapor concentration of the raw material gas in the mixed gas easily and highly accurately and displaying the concentration in real time without using an expensive concentration meter, etc.
    Type: Grant
    Filed: July 17, 2012
    Date of Patent: April 25, 2017
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Kaoru Hirata, Atushi Hidaka, Kouji Nishino, Nobukazu Ikeda, Takeshi Nakamura
  • RAW MATERIAL VAPORIZING AND SUPPLYING APPARATUS EQUIPPED WITH RAW MATERIAL CONCENTRATION
    Publication number: 20140299206
    Abstract: An apparatus able to regulate a raw material concentration, in a mixed gas of carrier gas and raw material gas, accurately and stably to supply the mixed gas to a process chamber, with a flow rate controlled highly accurately, thereby detecting a vapor concentration of the raw material gas in the mixed gas easily and highly accurately and displaying the concentration in real time without using an expensive concentration meter, etc.
    Type: Application
    Filed: July 17, 2012
    Publication date: October 9, 2014
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masaaki Nagase, Kaoru Hirata, Atushi Hidaka, Kouji Nishino, Nobukazu Ikeda, Takeshi Nakamura