Patents by Inventor Aude Lefevre

Aude Lefevre has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8460987
    Abstract: A method for producing a layer of AlN having substantially vertical sides relative to the surface of a substrate, including: the formation of an AlN growth layer on a substrate, the deposition of the AlN layer, on at least said growth layer, the formation of a mask layer over the AlN layer, at least one edge of which is aligned with at least one edge or side of the growth layer, in a plane which is substantially perpendicular to a surface of the substrate or a surface of the growth layer, and the etching of the AlN layer.
    Type: Grant
    Filed: April 29, 2011
    Date of Patent: June 11, 2013
    Assignee: Commissariat a l'energie atomique et aux energies alternatives
    Inventors: Marc Aid, Emmanuel Defay, Aude Lefevre, Guy-Michel Parat
  • Publication number: 20110266594
    Abstract: A method is disclosed, for producing a layer of AlN having substantially vertical sides relative to the surface of a substrate, comprising: the formation of an AlN growth layer on a substrate, the deposition of the AlN layer, on at least said growth layer, the formation of a mask layer over the AlN layer, at least one edge of which is aligned with at least one edge or side of the growth layer, in a plane which is substantially perpendicular to a surface of the substrate or a surface of the growth layer, the etching of the AlN layer.
    Type: Application
    Filed: April 29, 2011
    Publication date: November 3, 2011
    Applicant: COMMISS. A L'ENERGIE ATOM. ET AUX ENERG. ALTERNA.
    Inventors: Marc Aid, Emmanuel Defay, Aude Lefevre, Guy-Michel Parat