Abstract: A method etching features through a stack of a silicon nitride layer over a silicon layer over a silicon oxide layer in a plasma processing chamber is provided. The silicon nitride layer is etched in the plasma processing chamber, comprising; flowing a silicon nitride etch gas; forming the silicon nitride etch gas into a plasma to etch the silicon nitride layer, and stopping the flow of the silicon nitride etch gas. The silicon layer is, comprising flowing a silicon etch gas, wherein the silicon etch gas comprises SF6 or SiF4, forming the silicon etch gas into a, and stopping the flow of the silicon etch gas. The silicon oxide layer is etched in the plasma processing chamber, comprising flowing a silicon oxide etch gas, forming the silicon oxide etch gas into a plasma, and stopping the flow of the silicon oxide etch gas.

Abstract: A method etching features through a stack of a silicon nitride layer over a silicon layer over a silicon oxide layer in a plasma processing chamber is provided. The silicon nitride layer is etched in the plasma processing chamber, comprising; flowing a silicon nitride etch gas; forming the silicon nitride etch gas into a plasma to etch the silicon nitride layer, and stopping the flow of the silicon nitride etch gas. The silicon layer is, comprising flowing a silicon etch gas, wherein the silicon etch gas comprises SF6 or SiF4, forming the silicon etch gas into a, and stopping the flow of the silicon etch gas. The silicon oxide layer is etched in the plasma processing chamber, comprising flowing a silicon oxide etch gas, forming the silicon oxide etch gas into a plasma, and stopping the flow of the silicon oxide etch gas.

Abstract: Mixed zeaxanthin C8–C20 carboxylic acid esters in which the mixed zeaxanthin esters constitute about 50 mg/g or more of the concentrate and wherein the zeaxanthin is about 20 percent or more of the total carotenoids present when assayed after saponification are disclosed, as are the products that can be made from such a concentrate, as well as the several uses for mixed zeaxanthin esters.

Abstract: Mixed zeaxanthin C8-C20 carboxylic acid esters in which the mixed zeaxanthin esters constitute about 50 mg/g or more of the concentrate and wherein the zeaxanthin is about 20 percent or more of the total carotenoids present when assayed after saponification are disclosed, as are the products that can be made from such a concentrate, as well as the several uses for mixed zeaxanthin esters.

Abstract: The present invention relates to developed seed that is singulated and free-flowing, and comprises a modified root structure whose root development is interrupted and altered, but that root development is capable of resuming when the developed seed is sown in a suitable environment. The developed seed can exhibit an emerged hypocotyl or lack an emerged hypocotyl. The developed seed is prepared as desiccation-intolerant seed and can be converted to be desiccation-tolerant. The present invention also relates to methods of making the developed seed.