Patents by Inventor Aung TOE

Aung TOE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11531312
    Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.
    Type: Grant
    Filed: April 16, 2021
    Date of Patent: December 20, 2022
    Assignee: MKS Instruments, Inc.
    Inventors: David J. Coumou, Yuriy Elner, Aung Toe, Daniel M. Gill, Eldridge M. Mount, IV, Shaun Smith
  • Publication number: 20210311448
    Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.
    Type: Application
    Filed: April 16, 2021
    Publication date: October 7, 2021
    Applicant: MKS Instruments, Inc.
    Inventors: David J. COUMOU, Yuriy ELNER, Aung TOE, Daniel M. GILL, Eldridge M. MOUNT, IV, Shaun SMITH
  • Patent number: 11042140
    Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.
    Type: Grant
    Filed: March 11, 2019
    Date of Patent: June 22, 2021
    Assignee: MKS Instruments, Inc.
    Inventors: David J. Coumou, Yuriy Elner, Aung Toe, Daniel M. Gill, Eldridge M. Mount, IV, Shaun Smith
  • Patent number: 11009843
    Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.
    Type: Grant
    Filed: March 11, 2019
    Date of Patent: May 18, 2021
    Assignee: MKS Instruments, Inc.
    Inventors: David J. Coumou, Yuriy Elner, Aung Toe, Daniel M. Gill, Eldridge M. Mount, IV, Shaun Smith
  • Patent number: 10741363
    Abstract: A radio frequency (RF) generator includes a RF power source configured to generate an output signal at an output frequency. The RF generator includes a frequency tuning module. The frequency tuning module generates a frequency control signal that controls the output frequency of the RF power source. The frequency control signal includes a frequency tuning signal component and a perturbation signal component. The perturbation signal varies an electrical parameter of the output signal. The frequency tuning signal is adjusted in accordance with a change in output signal in response to the perturbation signal.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: August 11, 2020
    Assignee: MKS Instruments, Inc.
    Inventors: Aaron M. Burry, Aaron T. Radomski, Aung Toe, Jesse N. Klein
  • Publication number: 20190391547
    Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.
    Type: Application
    Filed: March 11, 2019
    Publication date: December 26, 2019
    Applicant: MKS Instruments, Inc.
    Inventors: David J. COUMOU, Yuriy ELNER, Aung TOE, Daniel M. GILL, Eldridge M. MOUNT, IV, Shaun SMITH