Patents by Inventor Aurelia Plihon

Aurelia Plihon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for drying a semiconductor wafer
    Patent number: 8486201
    Abstract: Disclosed is a method for drying a plate-like article; the method including rinsing with an aqueous rinsing liquid with subsequent rinsing with an organic solvent, wherein the organic solvent has a water content of below 20 mass-% wherein the organic solvent is supplied at a solvent temperature, which is at least 30° C. and not higher than 60° C.
    Type: Grant
    Filed: July 1, 2010
    Date of Patent: July 16, 2013
    Assignee: Lam Research AG
    Inventor: Aurelia Plihon
  • METHOD FOR DRYING A SEMICONDUCTOR WAFER
    Publication number: 20120085372
    Abstract: Disclosed is a method for drying a plate-like article; the method including rinsing with an aqueous rinsing liquid with subsequent rinsing with an organic solvent, wherein the organic solvent has a water content of below 20 mass-% wherein the organic solvent is supplied at a solvent temperature, which is at least 30° C. and not higher than 60° C.
    Type: Application
    Filed: July 1, 2010
    Publication date: April 12, 2012
    Applicant: LAM RESEARCH AG
    Inventor: Aurelia Plihon