Abstract: An apparatus for testing of electrical or physical properties of a material include a single coil sensor mounted adjacent to a sample of the material. Sheet conductance of a wide variety of materials may be measured using the single coil to determine if the material conforms to generally accepted standards for the use to which the material will be put. In some examples, the material is a semiconductor wafer or flat panel. In other examples, the material is the body tissue of a patient. A non-invasive technique using the apparatus is also disclosed for monitoring the health of patient tissue such as musculature, and/or to determine whether healthy circulation is present, by measuring the conductance of the patient tissue in response to a magnetic field applied by the single coil. The single coil may be hand held, or it may be movable using an automated positioning system under computer control.

Abstract: An apparatus for testing of electrical or physical properties of a material include a single coil sensor mounted adjacent to a sample of the material. Sheet conductance of a wide variety of materials may be measured using the single coil to determine if the material conforms to generally accepted standards for the use to which the material will be put. In some examples, the material is a semiconductor wafer or flat panel. In other examples, the material is the body tissue of a patient. A non-invasive technique using the apparatus is also disclosed for monitoring the health of patient tissue such as musculature, and/or to determine whether healthy circulation is present, by measuring the conductance of the patient tissue in response to a magnetic field applied by the single coil. The single coil may be hand held, or it may be movable using an automated positioning system under computer control.

Abstract: An apparatus (10) for contactless measurement of sheet charge density and mobility includes a microwave source (16), a circular waveguide (50) for transmitting microwave power to a sample (59), such as a semiconductor wafer or panel for flat panel displays, at a measurement location, a first detector (18) for detecting the forward microwave power, a second detector (23) for detecting the microwave power reflected from the sample, and a third detector (95) for detecting the Hall effect power. An automatic positioning subsystem (700) is also provided for allowing automatic positioning of a wafer (59) within the test apparatus (10). The positioning system (700) includes a first end effector (706) and a rotator-lifter (704).

Abstract: An apparatus (10) for contactless measurement of sheet charge density and mobility includes a microwave source (16), a circular waveguide (50) for transmitting microwave power to a sample (59), such as a semiconductor wafer or panel for flat panel displays, at a measurement location, a first detector (18) for detecting the forward microwave power, a second detector (23) for detecting the microwave power reflected from the sample, and a third detector (95) for detecting the Hall effect power. An automatic positioning subsystem (700) is also provided for allowing automatic positioning of a wafer (59) within the test apparatus (10). The positioning system (700) includes a first end effector (706) and a rotator-lifter (704).

Abstract: An apparatus for testing of electrical or physical properties of a material include a single coil sensor mounted adjacent to a sample of the material. Sheet conductance of a wide variety of materials may be measured using the single coil to determine if the material conforms to generally accepted standards for the use to which the material will be put. In some examples, the material is a semiconductor wafer or flat panel. In other examples, the material is the body tissue of a patient. A non-invasive technique using the apparatus is also disclosed for monitoring the health of patient tissue such as musculature, and/or to determine whether healthy circulation is present, by measuring the conductance of the patient tissue in response to a magnetic field applied by the single coil. The single coil may be hand held, or it may be movable using an automated positioning system under computer control.