Patents by Inventor Austin Patrick Lane

Austin Patrick Lane has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polymer brush reflow for directed self-assembly of block copolymer thin films
    Patent number: 11008481
    Abstract: A method comprises forming a first structured pattern having a first line width on a substrate. A polymer brush is deposited on the structured pattern, which is annealed a first time at a first temperature and then annealed a second time at a second temperature higher than the first temperature. A block copolymer is deposited on the structured pattern and polymer brush, and aligned first block and second block structures are formed on the structured pattern and polymer brush. The first block structures and portions of the polymer brush and the structured pattern positioned beneath the first block structures are removed, and the substrate between the second block structures is exposed. The second block structures are then removed to form a second structured pattern in the substrate having a second line width, the second line width being smaller than the first line width.
    Type: Grant
    Filed: May 29, 2018
    Date of Patent: May 18, 2021
    Assignee: Seagate Technology LLC
    Inventors: Xiaomin Yang, Austin Patrick Lane, Michael Joseph Maher, Gregory Blachut