Abstract: Apparatus using mechanically-actuated evanascent wave coupling. At least a portion of an optical waveguide is integrated onto a substrate, and an optically active element is physically moved relatively to each other, with the result that propagation parameters for the waveguide are substantially altered. The optically active element may be a resonator or another waveguide. Altered propagation parameters can be used to cause an optical wave to be transformed in response to an electromagnetic signal. Physical parts of the apparatus can vary widely in both size and tolerance. The optically active element is mechanically actuated relative to a position of the optical waveguide.

Abstract: A microelectromechanical (MEMS) device has a substrate, and at least one, generally planar moving element, such as an absorber or a mirror, disposed in parallel to the surface of the substrate. An actuator is operatively engageable with the moving element for selectively actuating the moving element between a series of successive, closely spaced positions in a plane horizontal to the surface of the substrate. The MEMS device may be effectively used as a variable attenuator and beam splitter. Various different actuators can be used. Preferably, the device is fabricated using a surface micromachining process.