Abstract: A MEMS apparatus is provided for scanning an optical beam. The MEMS apparatus is formed out of a pre-fabricated multi-layer device and comprises at least one tilting micro-mirror formed in a first active layer of that pre-fabricated multi-layer device and a support structure formed in a second layer of the pre-fabricated multi-layer device, and wherein the support structure is preferably formed by etching parts of the second layer to obtain a pre-determined shape of the supporting structure.

Abstract: Devices with tilting plates, in particular tilting mirror plates, having improved dynamic flatness and shock resistance and methods for forming and operating such devices. A mirror device includes a minor plate operative to perform a tilt motion around a mirror tilt axis and an elastic foundation which provides distributed support to the minor plate. In an embodiment, the minor plate and the elastic foundation are formed in a single silicon-on-insulator (SOI) wafer. In another embodiment, the minor plate and the elastic foundation are formed in separate SOI wafers. The elastic foundation may include spiral or serpentine or any other appropriate shaped springs distributed uniformly or non-uniformly between the minor plate and a base.

Abstract: A MEMS apparatus is provided for scanning an optical beam. The MEMS apparatus is formed out of a pre-fabricated multi-layer device and comprises at least one tilting micro-mirror formed in a first active layer of that pre-fabricated multi-layer device and a support structure formed in a second layer of the pre-fabricated multi-layer device, and wherein the support structure is preferably formed by etching parts of the second layer to obtain a pre-determined shape of the supporting structure.

Abstract: A MEMS apparatus for scanning an optical beam comprises a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis formed in a double active layer silicon-on-insulator (SOI) substrate. The apparatus may include a bouncing mechanism operative to provide a bouncing event and to reverse the rotational motion. The bouncing event provides the mirror with a piecewise linear response to actuation by intrinsically nonlinear electrostatic forces. In a particular embodiment, the bouncing mechanism includes a vertical comb drive stator built in the same active layer of the double active layer SOI substrate, while actuator comb drive stators are built in a different active layer.

Abstract: A MEMS apparatus for scanning an optical beam comprises a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis formed in a double active layer silicon-on-insulator (SOI) substrate. The apparatus may include a bouncing mechanism operative to provide a bouncing event and to reverse the rotational motion. The bouncing event provides the mirror with a piecewise linear response to actuation by intrinsically nonlinear electrostatic forces. In a particular embodiment, the bouncing mechanism includes a vertical comb drive stator built in the same active layer of the double active layer SOI substrate, while actuator comb drive stators are built in a different active layer.

Abstract: A MEMS apparatus for scanning an optical beam comprises a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis formed in a double active layer silicon-on-insulator (SOI) substrate. The apparatus may include a bouncing mechanism operative to provide a bouncing event and to reverse the rotational motion. The bouncing event provides the mirror with a piecewise linear response to actuation by intrinsically nonlinear electrostatic forces. In a particular embodiment, the bouncing mechanism includes a vertical comb drive stator built in the same active layer of the double active layer SOI substrate, while actuator comb drive stators are built in a different active layer.

Abstract: A MEMS apparatus for scanning an optical beam comprises a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis formed in a double active layer silicon-on-insulator (SOI) substrate. The apparatus may include a bouncing mechanism operative to provide a bouncing event and to reverse the rotational motion. The bouncing event provides the mirror with a piecewise linear response to actuation by intrinsically nonlinear electrostatic forces. In a particular embodiment, the bouncing mechanism includes a vertical comb drive stator built in the same active layer of the double active layer SOI substrate, while actuator comb drive stators are built in a different active layer.

Abstract: Magnetically and electromagnetically driven MEMS devices for reflecting light signals and for switching radio frequency (RF) signals are provided. In a preferred embodiment, a light reflecting device such as a mirror or micro-scanner comprises a plate operative to reflect light and at least two conductive flexural actuators connected to the plate and to a substrate and operative to impart a rotation or tilt motion to the plate under a force arising from the interaction of a current passing through the conductive flexural actuators and a magnetic field parallel to the substrate. An RF switch comprises a substrate and a membrane having a longitudinal dimension and a lateral dimension, the membrane positioned substantially parallel to and attached to the substrate and operative to provide at least two switching positions in response to actuation by a Lorenz force acting on it.

Abstract: A hollow waveguide based optical switch, and novel hollow waveguide-based switch architectures for optical communications. The switch comprises a pair of hollow waveguides overlapping over a common section that includes a common opening, a first conductive flexible lever attached to one of the hollow waveguides, the first lever configured to assume upon actuation at least two switching positions within the pair of waveguides at the common opening, a second conductive flexible lever attached to the other of the hollow waveguides, the second lever configured to assume upon same the actuation same at least two switching positions within the pair of waveguides as the first lever while keeping a substantially parallel geometry with the first lever, and means to actuate the first and the second levers in order to achieve the at least two switching positions.

Abstract: An optical wavelength converter that includes an optical sum frequency generator (SFG) and an optical difference frequency generator (DFG). The SFG receives part of both an input beam and a continuous-wave (CW) beam. The DFG receives part of the input beam as well as the output of the SFG. The output of the DFG represents the signal of the input beam modulated or carried on a beam having the frequency of the CW beam. Both single-channel and multi-channel configurations are integrally realized in similar numbers of components.

Abstract: A RF switch comprises a substrate having two RF traces separated by a first gap, and coplanar ground traces separated from tile RF traces by a second gap, a membrane substantially parallel to the substrate and incorporating a conductive bridge, and an electrical mechanism for bringing the bridge into contact with the RF and ground traces, and for spacing the bridge apart from these traces. The membrane flexes in a membrane mode toward and away from the traces, providing extremely fast switching. A series configuration includes the bridge shorting the two RF traces, and a shunt configuration includes the bridge shorting the RF and aground traces. A separate embodiment provides a membrane vertical to the substrate and flexing in a direction parallel to it.

Abstract: A spatial light modulator (SLM) has electrically controllable microelectromechanical reflectors arranged in a chain-like manner along an axis such that an optical beam propagates by reflection from an input down the chain to an output. Each reflector can be moved to a selected one of a number of discrete switching positions. The position determines the angle at which the beam is reflected toward the next reflector in the chain. The combination of positions in which the reflectors are oriented is determinative of the angle at which the signal exits the output. The SLM can be included in a switch. An SLM in the input section of the switch can be adjusted to direct the beam such that it impinges upon a selected switch output. Multiple SLMs can be included in an array to provide a cross-connect or crossbar switch.

Abstract: A hollow waveguide based optical switch, and novel hollow waveguide-based switch architectures for optical communications. The switch comprises a pair of hollow waveguides overlapping over a common section that includes a common opening, a first conductive flexible lever attached to one of the hollow waveguides, the first lever configured to assume upon actuation at least two switching positions within the pair of waveguides at the common opening, a second conductive flexible lever attached to the other of the hollow waveguides, the second lever configured to assume upon same the actuation same at least two switching positions within the pair of waveguides as the first lever while keeping a substantially parallel geometry with the first lever, and means to actuate the first and the second levers in order to achieve the at least two switching positions.

Abstract: An optical wavelength converter that includes an optical sum frequency generator (SFG) and an optical difference frequency generator (DFG). The SFG receives part of both an input beam and a continuous-wave (CW) beam. The DFG receives part of the input beam as well as the output of the SFG. The output of the DFG represents the signal of the input beam modulated or carried on a beam having the frequency of the CW beam. Both single-channel and multi-channel configurations are integrally realized in similar numbers of components.

Abstract: A spatial light modulator (SLM) has electrically controllable microelectromechanical reflectors arranged in a chain-like manner along an axis such that an optical beam propagates by reflection from an input down the chain to an output. Each reflector can be moved to a selected one of a number of discrete switching positions. The position determines the angle at which the beam is reflected toward the next reflector in the chain. The combination of positions in which the reflectors are oriented is determinative of the angle at which the signal exits the output. The SLM can be included in a switch. An SLM in the input section of the switch can be adjusted to direct the beam such that it impinges upon a selected switch output. Multiple SLMs can be included in an array to provide a cross-connect or crossbar switch.