Patents by Inventor Aya NISHIMURA

Aya NISHIMURA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10988636
    Abstract: To provide a polishing composition capable of polishing an object to be polished containing a silicon nitride film at a high polishing removal rate and reducing the particle residual amount on the object to be polished and a method for manufacturing the same, a polishing method, and a method for manufacturing a substrate. A polishing composition is a polishing composition containing abrasives, an anionic surfactant, and a dispersion medium, in which the anionic surfactant has at least one kind of acidic functional group selected from the group consisting of a sulfo group, a phosphate group, and a phosphonic acid group and a polyoxyalkylene group and the pH is less than 7 and which is used for polishing an object to be polished containing a silicon nitride film.
    Type: Grant
    Filed: August 8, 2019
    Date of Patent: April 27, 2021
    Assignee: FUJIMI INCORPORATED
    Inventors: Toshio Shinoda, Aya Nishimura
  • Publication number: 20200048497
    Abstract: To provide a polishing composition capable of polishing an object to be polished containing a silicon nitride film at a high polishing removal rate and reducing the particle residual amount on the object to be polished and a method for manufacturing the same, a polishing method, and a method for manufacturing a substrate. A polishing composition is a polishing composition containing abrasives, an anionic surfactant, and a dispersion medium, in which the anionic surfactant has at least one kind of acidic functional group selected from the group consisting of a sulfo group, a phosphate group, and a phosphonic acid group and a polyoxyalkylene group and the pH is less than 7 and which is used for polishing an object to be polished containing a silicon nitride film.
    Type: Application
    Filed: August 8, 2019
    Publication date: February 13, 2020
    Applicant: FUJIMI INCORPORATED
    Inventors: Toshio Shinoda, Aya Nishimura
  • Publication number: 20190085208
    Abstract: To provide a polishing composition capable of polishing objects to be polished, such as simple substance silicon, silicon compounds, and metals, at a high polishing removal rate. The polishing composition contains a polishing removal accelerator containing a compound having a ring structure configured to contain four or more nitrogen atoms, abrasives, and a liquid medium.
    Type: Application
    Filed: September 12, 2018
    Publication date: March 21, 2019
    Applicant: FUJIMI INCORPORATED
    Inventors: Toshio SHINODA, Aya NISHIMURA