Abstract: A substrate fixing device includes a base plate, a heat-generating part provided on the base plate via an adhesive layer, and an electrostatic chuck provided on the heat-generating part and configured to adsorb and hold a target object. The heat-generating part includes a first insulating layer having a first surface and a second surface opposite to the first surface, the first surface being in contact with the electrostatic chuck, a heat-generating element arranged on the second surface of the first insulating layer, and a second insulating layer stacked on the second surface of the first insulating layer and covering the heat-generating element. A through-hole penetrating through the base plate, the adhesive layer, and the second insulating layer and exposing a part of the heat-generating element is provided. A glass transition temperature of the second insulating layer is higher than a glass transition temperature of the first insulating layer.

Abstract: A substrate fixing device includes: a base plate; and an electrostatic chuck that is fixed to the base plate and configured to adsorb a substrate by electrostatic force. The electrostatic chuck includes: a ceramic layer that is formed of a ceramic and that is configured to adsorb the substrate in a state that the ceramic layer contacts the substrate; a first heater pattern that is disposed on the ceramic layer and configured to generate heat; an insulating resin layer that is disposed on the first heater pattern to cover the first heater pattern; a second heater pattern that is disposed on the insulating resin layer and configured to generate heat; and an electrically conductive member that penetrates the insulating resin layer such that one end of the electrically conductive member contacts a surface of the first heater pattern and the other end of the electrically conductive member contacts a surface of the second heater pattern.

Abstract: When a key member is inserted into a key cylinder attached to a toy main body, and in the case where the key member is inserted completely, the key member turns on a first switch, and it is checked that the key member is inserted completely. If in this state the key member is rotated, some of a plurality of second switches are turned on. According to the combination of second switches turned on at this time, sound and light are emitted in a predetermined pattern, and therefore the user feels that sound and light are emitted by their operation.