Abstract: To provide a user with a new sensation through a tactile sensation, an auditory sensation, and a visual sensation, a human body support device has an overall shape that can easily be used as a chair or a couch. The human body support device includes a frame that is formed from, for example, metal or resin, and a plurality of modules that are arranged in a plurality of sites to support the user body on the frame. These modules include a sound emitting module that is provided with a speaker, and a vibrating and light-emitting module that is provided with an LED and a voice coil motor. These modules have an elastic part that is formed by an elastic material such as a sponge in a location that is in contact with the user body. The orientation and position of the modules are designed so as to be in proper contact with and support the user body, and accordingly, the user body can be comfortably supported.

Abstract: A device for the measurement of a temperature in a relatively low range having the lower limit of below 100.degree. C. is proposed. The device is suitably used for measuring a temperature of a substrate 4 during a sputtering treatment in a vacuum environment. Infrared rays radiated from the substrate 4 in a vacuum chamber 1 are collected by an optical lens 13 mounted in a freely movable probe 10 via a mirror (15) provided in a hood 14 attached to a front end of the probe (10) for deflecting the incident rays to the lens 13. The collected rays are led outside the chamber 1 to a sensor through a fluoride fiber 8 optically connected to the lens 13. The fiber 8 is enveloped in an air-tight manner within a metal bellows 9.