Abstract: According to an embodiment of the invention, a pattern density checking program product for causing a computer including a storage unit prestoring chip data about a pattern density check target chip and mask data of the chip to execute a pattern density checking process, includes: a first step of reading the mask data and creating a scribing frame model having a data ratio of a scribing frame corresponding to one density check target chip based on the mask data; and a second step of reading the chip data and executing a density check for one chip including the chip data and the scribing frame model.