Patents by Inventor Ayuko Sato

Ayuko Sato has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of and apparatus for evaluating an optimal irradiation amount of an electron beam for drawing a pattern onto a sample
    Patent number: 8710468
    Abstract: Stored energy is evaluated for each of segmented regions, and using the evaluated stored energy, an optimal irradiation amount for an electron beam is evaluated by a conjugate gradient method. The evaluated stored energy is used instead of calculating a determinant (Apk) in the procedure that includes calculation of the determinant (Apk) from among repeated calculation procedures that follow the conjugate gradient method and seek to answer a simultaneous linear equation (Ax=b) with a matrix (A) as a coefficient. Thus it is possible to evaluate the optimal irradiation amount for an electron beam with a high processing speed and a high degree of accuracy, and without expressly requiring the calculation of Apk, by managing the giant matrix (A) comprising numerous factors according to reduction of lines of circuitry in a circuit pattern.
    Type: Grant
    Filed: July 27, 2011
    Date of Patent: April 29, 2014
    Assignee: Nippon Control System Corporation
    Inventors: Dai Tsunoda, Masahiro Shoji, Hiroyuki Tsunoe, Shuji Hada, Ayuko Sato
  • DRAWING METHOD AND DRAWING DEVICE
    Publication number: 20130193354
    Abstract: Stored energy is evaluated for each of segmented regions, and using the evaluated stored energy, an optimal irradiation amount for an electron beam is evaluated by a conjugate gradient method. The evaluated stored energy is used instead of calculating a determinant (Apk) in the procedure that includes calculation of the determinant (Apk) from among repeated calculation procedures that follow the conjugate gradient method and seek to answer a simultaneous linear equation (Ax=b) with a matrix (A) as a coefficient. Thus it is possible to evaluate the optimal irradiation amount for an electron beam with a high processing speed and a high degree of accuracy, and without expressly requiring the calculation of Apk, by managing the giant matrix (A) comprising numerous factors according to reduction of lines of circuitry in a circuit pattern.
    Type: Application
    Filed: July 27, 2011
    Publication date: August 1, 2013
    Applicant: NIPPON CONTROL SYSTEM CORPORATION
    Inventors: Dai Tsunoda, Masahiro Shoji, Hiroyuki Tsunoe, Shuji Hada, Ayuko Sato