Patents by Inventor Béatrice Wenk

Béatrice Wenk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8887382
    Abstract: The invention relates to a pendulous accelerometer including a pendulous electrode formed in a substrate, at least one counter electrode, and an encapsulation cover. The at least one counter electrode is formed under the cover, and spacers are positioned between the cover and the substrate.
    Type: Grant
    Filed: December 5, 2008
    Date of Patent: November 18, 2014
    Assignee: MEMSCAP
    Inventors: Béatrice Wenk, Jean-Francois Veneau, Greg Hames
  • Patent number: 8300384
    Abstract: The invention relates to an air variable capacitor including a mobile comb and a fixed comb. Each of the combs include a body and teeth each having an end fixed to the body and free end. The teeth of the mobile and fixed combs being interdigital and an the air-gap of the capacitor is adjustable by the transverse movement of the teeth of the mobile comb. The teeth of the mobile comb have geometric differences between one another, in order to attenuate the transverse resonance modes of the mobile comb.
    Type: Grant
    Filed: December 8, 2008
    Date of Patent: October 30, 2012
    Assignee: MEMSCAP
    Inventor: Béatrice Wenk
  • Patent number: 7919345
    Abstract: A method is disclosed of fabricating micromechanical components provided with free-standing microstructures or membranes with predetermined mechanical stress, by initially depositing a sacrificial layer on a substrate followed by depositing a polysilicon layer on the sacrificial layer by a gaseous phase deposition and, finally, at least partial removal of the sacrificial layer. During deposition of the polysilicon layer, the process pressure selected determined the type of stress in the polysilicon layer, and the value of the stress is set by the process temperature selected. The process pressure is above the pressure range used in LPCVD reactors.
    Type: Grant
    Filed: November 21, 1995
    Date of Patent: April 5, 2011
    Assignee: Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
    Inventors: Mario Kirsten, Peter Lange, Beatrice Wenk, Werner Riethmueller
  • Publication number: 20090147436
    Abstract: The invention relates to an air variable capacitor including a mobile comb and a fixed comb. Each of the combs include a body and teeth each having an end fixed to the body and free end. The teeth of the mobile and fixed combs being interdigital and an the air-gap of the capacitor is adjustable by the transverse movement of the teeth of the mobile comb. The teeth of the mobile comb have geometric differences between one another, in order to attenuate the transverse resonance modes of the mobile comb.
    Type: Application
    Filed: December 8, 2008
    Publication date: June 11, 2009
    Applicant: MEMSCAP
    Inventor: Beatrice Wenk
  • Publication number: 20090145227
    Abstract: The invention relates to a pendulous accelerometer including a pendulous electrode formed in a substrate, at least one counter electrode, and an encapsulation cover. The at least one counter electrode is formed under the cover, and spacers are positioned between the cover and the substrate.
    Type: Application
    Filed: December 5, 2008
    Publication date: June 11, 2009
    Applicant: MEMSCAP
    Inventors: Beatrice Wenk, Jean-Francois Veneau, Greg Hames
  • Patent number: 6700299
    Abstract: The present invention relates to an assembly of variable capacitance as well as to a method of operating the assembly. In the assembly, a variable capacitor is formed by a variable coverage or a variable distance of at least one first (4) and one second electrically conductive region (5). The first electrically conductive region (4) is configured on or in a substrate (1) and said second electrically conductive region (5) is configured on or in an actuator element (3) of a first micro-mechanical actuator (2). The actuator (2) is disposed on the substrate (1) in such a way that it can perform a movement of the actuator element (3) with the second region (5) along a surface of the substrate (1) at different positions relative to the first region (4), at which positions the second region (5) overlaps the first region (4) at least partly.
    Type: Grant
    Filed: March 31, 2003
    Date of Patent: March 2, 2004
    Assignee: Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
    Inventors: Hans-Joachim Quenzer, Bernd Wagner, Beatrice Wenk
  • Publication number: 20040012299
    Abstract: The present invention relates to an assembly of variable capacitance as well as to a method of operating the assembly. In the assembly, a variable capacitor is formed by a variable coverage or a variable distance of at least one first (4) and one second electrically conductive region (5). The first electrically conductive region (4) is configured on or in a substrate (1) and said second electrically conductive region (5) is configured on or in an actuator element (3) of a first micro-mechanical actuator (2). The actuator (2) is disposed on the substrate (1) in such a way that it can perform a movement of the actuator element (3) with the second region (5) along a surface of the substrate (1) at different positions relative to the first region (4), at which positions the second region (5) overlaps the first region (4) at least partly.
    Type: Application
    Filed: March 31, 2003
    Publication date: January 22, 2004
    Inventors: Hans-Joachim Quenzer, Bernd Wagner, Beatrice Wenk