Abstract: Electronic device manufacturing systems may include an equipment front end module (EFEM) having a load port assembly configured to receiving a substrate carrier, which may be a front opening unified pod (FOUP). The load port assembly may have a receiving plate upon which the substrate carrier may be received. The receiving plate may have a plurality of gas nozzles that can be coupled to purge ports in a bottom of the substrate carrier and to a purge apparatus of the load port assembly. The purge apparatus is configured to provide a gas to the substrate carrier at a selectable gas flow rate and, in some embodiments, to provide a gas to different portions of the substrate carrier each at a selectable gas flow rate. Methods of providing selectable gas flow rates for purging a substrate carrier coupled to a load port assembly are also provided, as are other aspects.

Abstract: Electronic device manufacturing systems may include an equipment front end module (EFEM) having a load port assembly configured to receiving a substrate carrier, which may be a front opening unified pod (FOUP). The load port assembly may have a receiving plate upon which the substrate carrier may be received. The receiving plate may have a plurality of gas nozzles that can be coupled to purge ports in a bottom of the substrate carrier and to a purge apparatus of the load port assembly. The purge apparatus is configured to provide a gas to the substrate carrier at a selectable gas flow rate and, in some embodiments, to provide a gas to different portions of the substrate carrier each at a selectable gas flow rate. Methods of providing selectable gas flow rates for purging a substrate carrier coupled to a load port assembly are also provided, as are other aspects.

Abstract: Lighting control systems, control modules for contactors, and methods of operating a lighting control system are described. In one example, a control module for a lighting contactor includes a controller, a power supply, and a control mode selector. The controller is configured to control operation of a lighting contactor in response to at least one control signal. The controller is selectively operable in a plurality of control modes. The power supply is configured to receive the at least one control signal and provide power to the controller. The control mode selector is coupled to the controller and operable to operate the controller in a selected control mode of the plurality of control modes.

Abstract: Lighting control systems, control modules for contactors, and methods of operating a lighting control system are described. In one example, a control module for a lighting contactor includes a controller, a power supply, and a control mode selector. The controller is configured to control operation of a lighting contactor in response to at least one control signal. The controller is selectively operable in a plurality of control modes. The power supply is configured to receive the at least one control signal and provide power to the controller. The control mode selector is coupled to the controller and operable to operate the controller in a selected control mode of the plurality of control modes.

Abstract: Embodiments of the present invention provide an apparatus and methods for processing solar cell devices. In one embodiment, a method removing particles from edge regions of the solar cell device by a cleaning module with a constant loading applied onto a back surface of the solar cell device, wherein the cleaning modules has two or more roller-type brushes disposed at opposed sides of a rotation table located before and/or after a quality assurance stage configured to measure and correct defects in the solar cell device, and transferring the solar cell device into an edge deletion station in which an electromagnetic radiation energy is used to remove materials from a top surface of the solar cell device. The roller-type brushes include non-abrasive bristles configured to remove unwanted material from the periphery region of the solar cell device prior to transferring into the edge delete station.