Patents by Inventor Bagrat Khachatryan

Bagrat Khachatryan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Combining X-ray and VUV analysis of thin film layers
    Patent number: 8565379
    Abstract: Apparatus for inspection of a sample includes an X-ray source, which is configured to irradiate a location on the sample with a beam of X-rays. An X-ray detector is configured to receive the X-rays that are scattered from the sample and to output a first signal indicative of the received X-rays. A VUV source is configured to irradiate the location on the sample with a beam of VUV radiation. A VUV detector is configured to receive the VUV radiation that is reflected from the sample and to output a second signal indicative of the received VUV radiation. A processor is configured to process the first and second signals in order to measure a property of the sample.
    Type: Grant
    Filed: March 14, 2012
    Date of Patent: October 22, 2013
    Assignee: Jordan Valley Semiconductors Ltd.
    Inventors: Isaac Mazor, Matthew Wormington, Ayelet Dag, Bagrat Khachatryan
  • Combining X-ray and VUV Analysis of Thin Film Layers
    Publication number: 20120275568
    Abstract: Apparatus for inspection of a sample includes an X-ray source, which is configured to irradiate a location on the sample with a beam of X-rays. An X-ray detector is configured to receive the X-rays that are scattered from the sample and to output a first signal indicative of the received X-rays. A VUV source is configured to irradiate the location on the sample with a beam of VUV radiation. A VUV detector is configured to receive the VUV radiation that is reflected from the sample and to output a second signal indicative of the received VUV radiation. A processor is configured to process the first and second signals in order to measure a property of the sample.
    Type: Application
    Filed: March 14, 2012
    Publication date: November 1, 2012
    Applicant: JORDAN VALLEY SEMICONDUCTORS LTD.
    Inventors: Isaac Mazor, Matthew Wormington, Ayelet Dag, Bagrat Khachatryan