Patents by Inventor Baheej Bathish

Baheej Bathish has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR INSPECTION TOOL SYSTEM AND METHOD FOR WAFER EDGE INSPECTION
    Publication number: 20240003826
    Abstract: A semiconductor inspection tool system is disclosed. The system comprises a first illumination setup for generating at least one first illumination radiation and for directing the at least one first illumination radiation to at least one bonding region non-filled volume formed between two layers of a multi-layer stack. The system also comprises a second illumination setup being for generating at least one second illumination radiation and for directing the at least one second illumination radiation at multi-layer stack edges. The second illumination radiation is configured for illuminating at least a normal edge of at least two layers, the second illumination setup has different radiation parameters than the first illumination setup. The system further includes a bonding region sensor unit for collecting reflected electromagnetic radiation from a bonding region volume and generating at least one sensing data being indicative of the bonding region.
    Type: Application
    Filed: June 29, 2023
    Publication date: January 4, 2024
    Inventors: Carmel Yehuda DRILLMAN, Moshe EDRI, Menachem REGENSBURGER, Baheej BATHISH, Mordi DAHAN
  • Semiconductor inspection tool system and method for wafer edge inspection
    Patent number: 11828713
    Abstract: A semiconductor inspection tool system is disclosed. The system comprises a first illumination setup for generating at least one first illumination radiation and for directing the at least one first illumination radiation to at least one bonding region non-filled volume formed between two layers of a multi-layer stack. The system also comprises a second illumination setup being for generating at least one second illumination radiation and for directing the at least one second illumination radiation at multi-layer stack edges. The second illumination radiation is configured for illuminating at least a normal edge of at least two layers, the second illumination setup has different radiation parameters than the first illumination setup. The system further includes a bonding region sensor unit for collecting reflected electromagnetic radiation from a bonding region volume and generating at least one sensing data being indicative of the bonding region.
    Type: Grant
    Filed: December 13, 2022
    Date of Patent: November 28, 2023
    Assignee: CAMTEK LTD
    Inventors: Carmel Yehuda Drillman, Moshe Edri, Menachem Regensburger, Baheej Bathish, Mordi Dahan