Patents by Inventor Bahubali S. Upadhye

Bahubali S. Upadhye has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11926903
    Abstract: Methods for etching alkali metal compounds are disclosed. Some embodiments of the disclosure expose an alkali metal compound to an alcohol to form a volatile metal alkoxide. Some embodiments of the disclosure expose an alkali metal compound to a ?-diketone to form a volatile alkali metal ?-diketonate compound. Some embodiments of the disclosure are performed in-situ after a deposition process. Some embodiments of the disclosure provide methods which selectively etch alkali metal compounds.
    Type: Grant
    Filed: June 9, 2022
    Date of Patent: March 12, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Nitin Deepak, Tapash Chakraborty, Prerna Sonthalia Goradia, Visweswaren Sivaramakrishnan, Nilesh Chimanrao Bagul, Bahubali S. Upadhye
  • Patent number: 11878532
    Abstract: Embodiments described herein relate to an inkjet printing platform. The inkjet printing platform is utilized for fabrication of optical films and optical device structures. The inkjet printing platform includes a transfer chamber, one or more inkjet chambers, a plurality of auxiliary modules, a substrate flipper, and load ports. The inkjet printing platform is operable to perform an inkjet printing process on a substrate to form an optical film and/or an optical device.
    Type: Grant
    Filed: January 12, 2022
    Date of Patent: January 23, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Daihua Zhang, Ludovic Godet, Michael David-Scott Kemp, Kang Luo, Kazuya Daito, Kenneth S. Ledford, Bahubali S. Upadhye, Hemantha Raju, John Rusconi, Elsa Massonneau, Mahendran Chidambaram, Alexey Stepanov, Visweswaren Sivaramakrishnan
  • Patent number: 11807008
    Abstract: Embodiments described herein relate to an inkjet service station and methods of servicing an inkjet printer with the inkjet service station. The inkjet service station is disposed in an inkjet printer of an inkjet chamber. The inkjet service station is operable to perform servicing operations on a processing apparatus of the inkjet printer. The servicing operations include at least one of printhead spitting, printhead purging, printhead flushing, printhead cleaning, printhead drying, or vacuum suction.
    Type: Grant
    Filed: January 12, 2022
    Date of Patent: November 7, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Daihua Zhang, Kang Luo, Kazuya Daito, Kenneth S. Ledford, Elsa Massonneau, Alexey Stepanov, Ludovic Godet, Mahendran Chidambaram, Visweswaren Sivaramakrishnan, Bahubali S. Upadhye, Hemantha Raju
  • Publication number: 20220396732
    Abstract: Methods for etching alkali metal compounds are disclosed. Some embodiments of the disclosure expose an alkali metal compound to an alcohol to form a volatile metal alkoxide. Some embodiments of the disclosure expose an alkali metal compound to a ?-diketone to form a volatile alkali metal ?-diketonate compound. Some embodiments of the disclosure are performed in-situ after a deposition process. Some embodiments of the disclosure provide methods which selectively etch alkali metal compounds.
    Type: Application
    Filed: June 9, 2022
    Publication date: December 15, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Nitin Deepak, Tapash Chakraborty, Prerna Sonthalia Goradia, Visweswaren Sivaramakrishnan, Nilesh Chimanrao Bagul, Bahubali S. Upadhye
  • Publication number: 20220362995
    Abstract: An additive manufacturing apparatus includes an environmentally sealed first chamber, a second chamber separated from the first chamber by a first valve, a platform positionable in the first chamber, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform in the first chamber, at least one energy source to selectively fuse feed material in a layer on the platform in the first chamber, and an air knife assembly to direct a laminar flow of air across a layer of feed material on the platform in the first chamber. The air knife assembly includes an inlet module and an exhaust module that are movable through the first valve between the first chamber and the second chamber.
    Type: Application
    Filed: July 20, 2022
    Publication date: November 17, 2022
    Inventors: Dakshalkumar Patel, Girish Kumar Chaturvedi, Bahubali S. Upadhye, Sumedh Acharya, Mahendran Chidambaram, Nilesh Chimanrao Bagul
  • Publication number: 20220363060
    Abstract: Embodiments described herein relate to an inkjet service station and methods of servicing an inkjet printer with the inkjet service station. The inkjet service station is disposed in an inkjet printer of an inkjet chamber. The inkjet service station is operable to perform servicing operations on a processing apparatus of the inkjet printer. The servicing operations include at least one of printhead spitting, printhead purging, printhead flushing, printhead cleaning, printhead drying, or vacuum suction.
    Type: Application
    Filed: January 12, 2022
    Publication date: November 17, 2022
    Inventors: Daihua ZHANG, Kang LUO, Kazuya DAITO, Kenneth S. LEDFORD, Elsa MASSONNEAU, Alexey STEPANOV, Ludovic GODET, Mahendran CHIDAMBARAM, Visweswaren SIVARAMAKRISHNAN, Bahubali S. UPADHYE, Hemantha RAJU
  • Publication number: 20220363064
    Abstract: Embodiments described herein relate to an inkjet printing platform. The inkjet printing platform is utilized for fabrication of optical films and optical device structures. The inkjet printing platform includes a transfer chamber, one or more inkjet chambers, a plurality of auxiliary modules, a substrate flipper, and load ports. The inkjet printing platform is operable to perform an inkjet printing process on a substrate to form an optical film and/or an optical device.
    Type: Application
    Filed: January 12, 2022
    Publication date: November 17, 2022
    Inventors: Daihua ZHANG, Ludovic Godet, Michael David-Scott Kemp, Kang Luo, Kazuya Daito, Kenneth S. Ledford, Bahubali S. Upadhye, Hemantha Raju, John Rusconi, Elsa Massonneau, Mahendran Chidambaram, Alexey Stepanov, Visweswaren Sivaramakrishnan
  • Publication number: 20220281168
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform, at least one energy source to selectively fuse feed material in a layer on the platform, and an air knife assembly. The air knife assembly includes an inlet unit to deliver gas over the platform and an exhaust unit to receive gas from over the platform. The exhaust unit includes a plenum having a port connected to a gas return conduit, and a gas collector that is open at a front end to receive gas from over the platform and has a concave plate at a back end of the gas collector. An aperture is formed at a back of the concave plate between the gas collector and the plenum to provide a constricted flow path for gas from the collector to the plenum.
    Type: Application
    Filed: May 23, 2022
    Publication date: September 8, 2022
    Inventors: Dakshalkumar Patel, Girish Kumar Chaturvedi, Bahubali S. Upadhye, Sumedh Acharya, Mahendran Chidambaram, Nilesh Chimanrao Bagul
  • Patent number: 11413817
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform, at least one energy source to selectively fuse feed material in a layer on the platform, and an air knife assembly. The air knife assembly includes an inlet unit to deliver gas over the platform and an exhaust unit to receive gas from over the platform. The inlet unit includes a multi-chamber plenum, a gas inlet, and a gas distribution module. The multi-chamber plenum has a plurality of vertically stacked chambers that are fluidically connected, with a first chamber of the plurality of vertically stacked chambers positioned at a higher elevation than a collection chamber of the plurality of vertically stacked chambers.
    Type: Grant
    Filed: November 14, 2019
    Date of Patent: August 16, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Dakshalkumar Patel, Girish Kumar Chaturvedi, Bahubali S. Upadhye, Sumedh Acharya, Mahendran Chidambaram, Nilesh Chimanrao Bagul
  • Patent number: 11400649
    Abstract: An additive manufacturing apparatus includes an environmentally sealed first chamber, a second chamber separated from the first chamber by a first valve, a platform positionable in the first chamber, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform in the first chamber, at least one energy source to selectively fuse feed material in a layer on the platform in the first chamber, and an air knife assembly to direct a laminar flow of air across a layer of feed material on the platform in the first chamber. The air knife assembly includes an inlet module and an exhaust module that are movable through the first valve between the first chamber and the second chamber.
    Type: Grant
    Filed: November 14, 2019
    Date of Patent: August 2, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Dakshalkumar Patel, Girish Kumar Chaturvedi, Bahubali S. Upadhye, Sumedh Acharya, Mahendran Chidambaram, Nilesh Chimanrao Bagul
  • Publication number: 20220162747
    Abstract: Exemplary methods of removing lithium-containing deposits may include heating a surface of a lithium-containing deposit. The surface may include oxygen or nitrogen, and the lithium-containing deposit may be disposed on a surface of a processing chamber. The methods may include contacting the surface of the lithium-containing deposit with a hydrogen-containing precursor. The contacting may hydrogenate the surface of the lithium-containing deposit. The methods may include contacting the lithium-containing deposit with a nitrogen-containing precursor to form volatile byproducts. The methods may include exhausting the volatile byproducts of the lithium-containing deposit from the processing chamber.
    Type: Application
    Filed: November 18, 2021
    Publication date: May 26, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Tapash Chakraborty, Nitin Deepak, Prerna Sonthalia Goradia, Bahubali S. Upadhye, Nilesh Chimanrao Bagul, Subramanya P. Herle, Visweswaren Sivaramakrishnan
  • Publication number: 20220016712
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser to deliver a layers of feed material onto the platform, one or more light sources to generate a first light beam and a plurality of second light beams, a galvo mirror scanner to scan the first light beam on a layer of feed material on the platform, and a plurality of polygon mirror scanners. The galvo mirror scanner has a first field of view that spans a width of a build area of the platform, whereas, each of the plurality of polygon mirror scanners having a second field of view with the plurality of polygon mirror scanners providing a plurality of second fields of view. Each second field of view is a portion of the first field of view, and the plurality of polygon mirror scanners are positioned such that the plurality of second fields of view span the width of the build area of the platform.
    Type: Application
    Filed: September 30, 2021
    Publication date: January 20, 2022
    Inventors: Bahubali S. Upadhye, Sumedh Acharya, Sandip Desai, David Masayuki Ishikawa, Eric Ng, Hou T. Ng
  • Patent number: 11154935
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material on the platform, at least one energy source to selectively fuse feed material in a layer on the platform, and an air knife supply unit. The air knife supply unit includes a tube having a plurality of holes spaced along a length of the tube, a multi-fluted helical screw positioned in the tube, a gas inlet configured to supply a gas into an end of the tube with the screw configured to guide the gas from the gas inlet through the tube and out the holes, and a spiral plenum surrounding the tube with the spiral plenum including an inner end to receive gas from the holes and an outer end to deliver the gas over the platform.
    Type: Grant
    Filed: May 31, 2019
    Date of Patent: October 26, 2021
    Assignee: Applied Materials, Inc.
    Inventors: Bahubali S. Upadhye, Sumedh Acharya, Sandip Desai, David Masayuki Ishikawa, Eric Ng, Hou T. Ng
  • Publication number: 20210094234
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform, at least one energy source to selectively fuse feed material in a layer on the platform, and an air knife assembly. The air knife assembly includes an inlet unit to deliver gas over the platform and an exhaust unit to receive gas from over the platform. The inlet unit includes a multi-chamber plenum, a gas inlet, and a gas distribution module. The multi-chamber plenum has a plurality of vertically stacked chambers that are fluidically connected, with a first chamber of the plurality of vertically stacked chambers positioned at a higher elevation than a collection chamber of the plurality of vertically stacked chambers.
    Type: Application
    Filed: November 14, 2019
    Publication date: April 1, 2021
    Inventors: Dakshalkumar Patel, Girish Kumar Chaturvedi, Bahubali S. Upadhye, Sumedh Acharya, Mahendran Chidambaram, Nilesh Chimanrao Bagul
  • Publication number: 20210094229
    Abstract: An additive manufacturing apparatus includes an environmentally sealed first chamber, a second chamber separated from the first chamber by a first valve, a platform positionable in the first chamber, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform in the first chamber, at least one energy source to selectively fuse feed material in a layer on the platform in the first chamber, and an air knife assembly to direct a laminar flow of air across a layer of feed material on the platform in the first chamber. The air knife assembly includes an inlet module and an exhaust module that are movable through the first valve between the first chamber and the second chamber.
    Type: Application
    Filed: November 14, 2019
    Publication date: April 1, 2021
    Inventors: Dakshalkumar Patel, Girish Kumar Chaturvedi, Bahubali S. Upadhye, Sumedh Acharya, Mahendran Chidambaram, Nilesh Chimanrao Bagul
  • Publication number: 20190366434
    Abstract: An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material on the platform, at least one energy source to selectively fuse feed material in a layer on the platform, and an air knife supply unit. The air knife supply unit includes a tube having a plurality of holes spaced along a length of the tube, a multi-fluted helical screw positioned in the tube, a gas inlet configured to supply a gas into an end of the tube with the screw configured to guide the gas from the gas inlet through the tube and out the holes, and a spiral plenum surrounding the tube with the spiral plenum including an inner end to receive gas from the holes and an outer end to deliver the gas over the platform.
    Type: Application
    Filed: May 31, 2019
    Publication date: December 5, 2019
    Inventors: Bahubali S. Upadhye, Sumedh Acharya, Sandip Desai, David Masayuki Ishikawa, Eric NG, Hou T. Ng