Abstract: A method for manufacturing a liner for a process chamber, a liner and a process chamber including the liner. A surface of a liner material is impressed with impressions by pressing, punching, dimpling, embossing, drilling, knurling or otherwise mechanically altering the surface without removing material. The impressions include depressions, protuberances, or a combination of depressions and protuberances that are separate or merge together. The impressions may be formed as one group or as two consecutive groups and may have different shapes and arrangement patterns. The surface may be roughened before or after forming the impressions. The roughening may be obtained from particulate blasting, plasma spray, and arc spray. The sheet of material may be aluminum, steel, an alloy or a composite material that is capable of being impressed by pressing or punching. The liner may be disposable or may be cleaned after a certain number of usage cycles.