Patents by Inventor Bala Shyamala Balaji

Bala Shyamala Balaji has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Diagnostic methods for substrate manufacturing chambers using physics-based models
    Patent number: 12147212
    Abstract: A method includes receiving first sensor data, generated during a manufacturing process by sensors associated with a substrate manufacturing chamber. The method further includes receiving simulated sensor data generated by a trained physics-based model. The method further includes determining which one or more components of the manufacturing chamber contribute to a difference between the first sensor data and the simulated sensor data. The method further includes causing performance of a corrective action in view of the difference.
    Type: Grant
    Filed: December 21, 2021
    Date of Patent: November 19, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Venkata Ravishankar Kasibhotla, Tao Zhang, Xiaoqun Zou, Bala Shyamala Balaji
  • DIAGNOSTIC METHODS FOR SUBSTRATE MANUFACTURING CHAMBERS USING PHYSICS-BASED MODELS
    Publication number: 20230195074
    Abstract: A method includes receiving first sensor data, generated during a manufacturing process by sensors associated with a substrate manufacturing chamber. The method further includes receiving simulated sensor data generated by a trained physics-based model. The method further includes determining which one or more components of the manufacturing chamber contribute to a difference between the first sensor data and the simulated sensor data. The method further includes causing performance of a corrective action in view of the difference.
    Type: Application
    Filed: December 21, 2021
    Publication date: June 22, 2023
    Inventors: Venkata Ravishankar Kasibhotla, Tao Zhang, Xiaoqun Zou, Bala Shyamala Balaji