Patents by Inventor Balamurali Murugaraj

Balamurali Murugaraj has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Replaceable end effector contact pads, end effectors, and maintenance methods
    Patent number: 11600580
    Abstract: Replaceable contact pads of end effectors are provided. The contact pads support substrates in electronic device manufacturing. The contact pad includes a contact pad head having a contact surface configured to contact a substrate, a shaft coupled to the contact pad head, the shaft including a shaft indent formed between an underside of the contact pad head and a shaft end, and a circular securing member received around the shaft and seated in the shaft indent and configured to secure the contact pad to the end effector body. End effectors including replaceable contact pads and maintenance methods are described, as are additional aspects.
    Type: Grant
    Filed: February 24, 2020
    Date of Patent: March 7, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Whitney Kroetz, Damon Keith Cox, Leon Volfovski, Jeffrey C. Hudgens, Balamurali Murugaraj
  • REPLACEABLE END EFFECTOR CONTACT PADS, END EFFECTORS, AND MAINTENANCE METHODS
    Publication number: 20200273826
    Abstract: Replaceable contact pads of end effectors are provided. The contact pads support substrates in electronic device manufacturing. The contact pad includes a contact pad head having a contact surface configured to contact a substrate, a shaft coupled to the contact pad head, the shaft including a shaft indent formed between an underside of the contact pad head and a shaft end, and a circular securing member received around the shaft and seated in the shaft indent and configured to secure the contact pad to the end effector body. End effectors including replaceable contact pads and maintenance methods are described, as are additional aspects.
    Type: Application
    Filed: February 24, 2020
    Publication date: August 27, 2020
    Inventors: Whitney Kroetz, Damon Keith Cox, Leon Volfovski, Jeffrey C. Hudgens, Balamurali Murugaraj