Patents by Inventor Barbara Averill

Barbara Averill has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SPECIFIC SITE BACKSIDE UNDERLAYING AND MICROMASKING METHOD FOR ELECTRICAL CHARACTERIZATION OF SEMICONDUCTOR DEVICES
    Publication number: 20050073333
    Abstract: A method for implementing backside probing of a semiconductor device includes isolating an identified defect area on a backside of the semiconductor device, and milling the identified defect area to an initial depth. Edges of the identified defect area are masked, wherein unmasked semiconductor material, beginning at the initial depth, is etched for a plurality of timed intervals until one or more active devices are reached. The one or more active devices are electrically probed.
    Type: Application
    Filed: October 6, 2003
    Publication date: April 7, 2005
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Barbara Averill, Terence Kane, Darrell Miles, Richard Oldrey, John Sylvestri